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Thermal Conductivity of Confined Ultrathin Polymers

Published online by Cambridge University Press:  31 January 2011

Marc G Ghossoub ,
Jung-Hyun Lee ,
Oksen T Baris ,
David G Cahill  and
Sanjiv Sinha
Marc G Ghossoub
Affiliation:
[email protected], University of Illinois at Urbana-Champaign, Mechanical Science and Engineering, Urbana, Illinois, United States
Jung-Hyun Lee
Affiliation:
[email protected], University of Illinois at Urbana-Champaign, Mechanical Science and Engineering, Urbana, Illinois, United States
Oksen T Baris
Affiliation:
[email protected], University of Illinois at Urbana-Champaign, Mechanical Science and Engineering, Urbana, Illinois, United States
David G Cahill
Affiliation:
[email protected], University of Illinois at Urbana-Champaign, Materials Science and Engineering, Urbana, Illinois, United States
Sanjiv Sinha
Affiliation:
[email protected], University of Illinois at Urbana-Champaign, Mechanical Science and Engineering, Urbana, Illinois, United States
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Abstract

We report ultrafast measurements of thermal transport in plasma polymerized CHF3 films deposited on standard Si substrates with Al sputtered on top. We characterize the thin films by X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), and spectroscopic ellipsometry and measure polymer thicknesses ranging from 33 nm down to 6 nm. Time-domain thermoreflectance (TDTR) provides quantitative data on the polymer thermal response to periodic heating from a pulsed laser source. A pump beam heats the Al layer, which acts as an opto-thermal transducer to the stack (Al-Polymer-Si) and a delayed probe beam measures the change in Al surface reflectance. We extract the polymer thermal conductivity by comparing TDTR data to a thermal diffusion model and find it to increase with decreasing polymer thicknesses below 30 nm.

Keywords

thin filmthermal conductivitypolymer
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1172: Symposium T – Nanoscale Heat Transport–From Fundamentals to Devices , 2009 , 1172-T02-03
Copyright
Copyright © Materials Research Society 2009

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