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Thermal Annealing Behavior of Si-DLC Ibad Coatings

Published online by Cambridge University Press:  03 September 2012

C. G. Fountzoulas ,
J. D. Demaree ,
L. C. Sengupta  and
J. K. Hirvonen
C. G. Fountzoulas
Affiliation:
Weapons & Materials Research Directorate, Army Research Laboratory, APG, MD 21005-5069, [email protected]
J. D. Demaree
Affiliation:
Weapons & Materials Research Directorate, Army Research Laboratory, APG, MD 21005-5069, [email protected]
L. C. Sengupta
Affiliation:
Weapons & Materials Research Directorate, Army Research Laboratory, APG, MD 21005-5069, [email protected]
J. K. Hirvonen
Affiliation:
Weapons & Materials Research Directorate, Army Research Laboratory, APG, MD 21005-5069, [email protected]
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Abstract

Amorphous, 700 nm thick, diamond-like carbon coatings containing silicon (Si-DLC), farmed by Ar+ ion beam assisted deposition (IBAD) on silicon substrates, were annealed in air at temperatures ranging from room temperature to 600°C for 30 minutes. RBS analysis showed that the composition of the films remained the same up to 200°C, but at higher temperatures the Si-DLC coatings began to oxidize at the outer surface of the coating, forming a surface layer of SiO2. After in-air annealing at 600°C the coating had been completely converted to SiO2, with no trace of carbon seen by RBS. FTIR spectra of the unannealed coatings showed a very broad mode typical of Si-DLC bonding as well as some absorption features associated with Si and SiO2. Above 200°C the transmission mode shifted to higher frequencies which may be caused by the growth of SiO2 and the decrease of the Si-DLC film thickness. The room temperature ball-on-disk friction coefficient of the coating against a 1/2′′ diameter 440 C steel ball at 1 N load ranged from 0.2 for the original coating up to 0.5 after a 100° anneal and returned to 0.2 after annealing at 200–400°C and fell to 0.12 after a 500°C exposure. The average Knoop microhardness (uncorrected for substrate effects) was 10 GPa (1,000 KHN) for coatings annealed at temperatures as high as 400°C. All coatings up to 500 °C passed the qualitative “Scotch Tape” test.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 438: Symposium A – Materials Modificaton and Synthesis by Ion Beam… , 1996 , 587
Copyright
Copyright © Materials Research Society 1997

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