Hostname: page-component-745bb68f8f-f46jp Total loading time: 0 Render date: 2025-01-12T05:26:44.982Z Has data issue: false hasContentIssue false
  • English
  • Français

Thermal and Pressure Sensing by Chemoreceptive Neuron MOS Transistors (CνMOS) with PVDF Coating

Published online by Cambridge University Press:  01 February 2011

Blake Jacquot ,
Nini Muñoz  and
Edwin C. Kan
Blake Jacquot
Affiliation:
[email protected], Cornell University, Electrical and Computer Engineering, 323 Phillips Hall, School of Electrical and Computer Engineering, Ithaca, NY, 14853, United States
Nini Muñoz
Affiliation:
[email protected], Cornell University, School of Electrical and Computer Engineering, Ithaca, NY, 14853, United States
Edwin C. Kan
Affiliation:
[email protected], Cornell University, School of Electrical and Computer Engineering, Ithaca, NY, 14853, United States
Get access

Abstract

This paper reports the integration of poled 10μm +/- 1μm P(VDF-TrFe) copolymer thin films with an adapted non-volatile, foundry-compatible CMOS structure (CνMOS) for the potential purposes of in-vivo piezoelectric and pyroelectric sensing. This structure allows for direct, reliable interaction between the sensing transducer and the highly sensitive MOSET gate stack without the need for an external reference electrode or chopper, as other designs may require.

Keywords

sensorSipiezoelectric
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 952: Symposium F – Integrated Nanosensors , 2006 , 0952-F09-08
Copyright
Copyright © Materials Research Society 2007

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Jacquot, B.C., Lee, C., Shen, Y.N. and Kan, E.C., “Time-resolved ion and molecule transport sensing with microfluidic integration by chemoreceptive neuron MOS transistors (CvMOS),” in Sensors, Proceedings of IEEE, 2005, pp. 101–104.Google Scholar
2. Shen, N.Y., Liu, Z., Lee, C., Minch, B.A. and Kan, E.C.-., “Charge-based chemical sensors: a neuromorphic approach with chemoreceptive neuron MOS (CvMOS) transistors,” Electron Devices, IEEE Transactions on, vol. 50, pp. 2171–2178, 2003.Google Scholar
3. Shen, N.Y., Liu, Z., Peng, S.Y., Minch, E.A. and Kan, E.C., “Polymer surface electrochemistry for chargebased sensing in chemoreceptive neuron MOS (CvMOS) transistors,” Sensors, Proceedings of IEEE, pp. 914–919, vol.2.Google Scholar
4. Kao, M.C., Wang, C.M., Chen, H.Z., Lee, M.S., and Chen, Y.C., “Thickness-dependent leakage current of (polyvinylidene fluoride/lead titanate) pyroelectric detectors,” Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on, vol. 50, No. 8, pp. 958–964, 2003.Google Scholar
5. Binnie, T.D., Weller, H.J., He, Z., and Setiadi, D., “An integrated 16X16 PVDF pyroelectric sensor array,” Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on, vol. 47, No. 6, pp. 1413–1420, 2000.Google Scholar
6. Weller, H.J., Setiadi, D., and Binnie, T.D., “Low-noise charge sensitive readout for pyroelectric sensor arrays using PVDF thin film”, Sensors and Actuators A, 85, pp. 267–274, 2000.Google Scholar
7. Foster, F.S., Harasiewicz, K.A., and Sherar, M.D., “A history of medical and biological imaging with polyvinylidene fluoride (PVDF) transducers,” Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on, vol. 47, No. 6, pp. 1363–1371, 2000.Google Scholar