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Test Rate Effects on The Mechanical Behavior of Thin Aluminum Films

Published online by Cambridge University Press:  10 February 2011

N. R. Moody
Affiliation:
Sandia National Laboratories, Livermore, CA 94551-0969
A. Strojny
Affiliation:
University of Minnesota, Minneapolis, MN 55455
D. Medlin
Affiliation:
Sandia National Laboratories, Livermore, CA 94551-0969
S. Guthrie
Affiliation:
Sandia National Laboratories, Livermore, CA 94551-0969
W. W. Gerberich
Affiliation:
University of Minnesota, Minneapolis, MN 55455
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Abstract

In this study, we employed nanoindentation testing to determine load rate and load rate change effects on the plastic response of a single crystal aluminum sample and of an 80 nm thick vapor deposited aluminum film on a sapphire substrate. The load rate tests showed that the thin film plastic properties exhibited a much stronger dependence on loading rate than the properties of the aluminum single crystal. In contrast, the load rate change data indicated a weak dependence of thin film plastic properties on loading. Scanning probe microscopy showed that the difference in behavior can be attributed primarily to pileup effects on contact area which increased with contact depth and loading rate. When contact area was corrected for increased pileup height, plastic properties were reduced to single crystal aluminum values.

Type
Research Article
Copyright
Copyright © Materials Research Society 1998

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