Hostname: page-component-586b7cd67f-r5fsc Total loading time: 0 Render date: 2024-11-24T10:44:22.211Z Has data issue: false hasContentIssue false
  • English
  • Français

Template-based Approach for the Synthesis of 2D/3D Nanostructures

Published online by Cambridge University Press:  11 July 2012

Cigang Xu ,
Qi Fang ,
Owain Thomas ,
Robert Gunn ,
Chris Hodson  and
Mike Cooke
Cigang Xu*
Affiliation:
Oxford Instruments Plasma Technology, North End, Yatton, Bristol BS49 4AP, UK
Qi Fang
Affiliation:
Oxford Instruments Plasma Technology, North End, Yatton, Bristol BS49 4AP, UK
Owain Thomas
Affiliation:
Oxford Instruments Plasma Technology, North End, Yatton, Bristol BS49 4AP, UK
Robert Gunn
Affiliation:
Oxford Instruments Plasma Technology, North End, Yatton, Bristol BS49 4AP, UK
Chris Hodson
Affiliation:
Oxford Instruments Plasma Technology, North End, Yatton, Bristol BS49 4AP, UK
Mike Cooke
Affiliation:
Oxford Instruments Plasma Technology, North End, Yatton, Bristol BS49 4AP, UK
*
*Email: [email protected]
Get access

Abstract

The template-based approach has been employed for the synthesis of nanomaterials with the potential application in the development of new material, energy and microelectronic devices. The templates are carbon nanotubes, to which the external contour is applied. Both plasmaenhanced chemical vapour deposition (PECVD) and atomic layer deposition (ALD) processes have been studied for various materials, including SiO2 and Al2O3. It is found that PECVD processes can give conformal coating on the template of carbon nanotubes, and the plasmaenhanced ALD (PEALD) processes do not show obvious damage to the morphology of carbon nanotubes. Pretreatment is also not necessary for the formation of conformal coatings of SiO2 and Al2O3. Moreover, the carbon nanotubes can be treated as the sacrificial template and removed to prepare the nanostructures with original contour. As an example, the 3-dimensional structure of Al2O3 has been demonstrated. This can be explored to develop 2D and 3D nanostructures of the intended materials. The approach of using PECVD and ALD processes makes it possible to integrate in a continuous way such kind of synthesis process with production processes of current semiconductor and energy industries.

Keywords

PECVDALDCarbon NanotubesTemplateConformal Coating
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1412: Symposium FF – Mechanical Nanofabrication, Nanopatterning and Nanoassembly , 2012 , mrsf11-1412-ff07-26
Copyright
Copyright © Materials Research Society 2012

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Hernandez, B.A., Chang, K.S., Fisher, E.R. and Dorhout, P.K., Chem. Mater., 14, 482 (2002).Google Scholar
2. Che, G., Lakshmi, B.B., Martin, C.R., and Fisher, E.R. and Ruoff, R.S., Chem. Mater. 10, 260-(1998).Google Scholar
3. Griffiths, H., Xu, C, Barrass, T, Cooke, M., Iacopi, F., Vereecken, P. and Esconjauregui, S., Surface and Coatings Technology, 201, 9215 (2007).Google Scholar
4. Elgamel, H.E.A, IEEE Transaction on Electron Devices, 45, 2131–2137(1998).Google Scholar
5. Poodt, P., Tiba, V., Werner, F., Schmidt, J., Vermeer, A. and Roozeboom, F., J. Electrochem. Soc., 158, H937 (2011).Google Scholar
6. Fang, Q., Xu, C. G., Liu, M., Li, G. H. and Hodson, C., 11th International Conference on Atomic Layer Deposition, Cambridge, USA, 2011.Google Scholar