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Surface Structure of Tetrahedral-Coordinated Amorphous Diamond-Like Carbon Films Grown by Pulsed Laser Deposition

Published online by Cambridge University Press:  28 February 2011

T. W. Mercer ,
N. J. DiNardo ,
L. J. Martinez-Miranda ,
F. Fang ,
T. A. Friedmann ,
J. P. Sullivan  and
M. P. Siegal
T. W. Mercer
Affiliation:
Drexel University, Department of Physics and Atmospheric Science, Philadelphia, PA 19104
N. J. DiNardo
Affiliation:
Drexel University, Department of Physics and Atmospheric Science, Philadelphia, PA 19104 University of Pennsylvania, Department of Materials Science and Engineering, Philadelphia, PA 19104
L. J. Martinez-Miranda
Affiliation:
Kent State University, Department of Physics, Kent, OH 44242 and University of Maryland, Department of Materials and Nuclear Engineering, College Park, MD 20742
F. Fang
Affiliation:
University of Pennsylvania, Department of Electrical Engineering, Philadelphia, PA 19104
T. A. Friedmann
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-0345
J. P. Sullivan
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-0345
M. P. Siegal
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-0345
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Abstract

The structure and composition of tetrahedral-coordinated amorphous diamondlike carbon films (a-tC) grown by pulsed laser deposition (PLD) of graphite has been studied with atomic force microscopy (AFM). The nanometer-scale surface structure has been studied as a function of growth parameters (e.g., laser energy density and film thickness) using contact-mode and tapping-mode AFM. Although the surfaces were found to be generally smooth, they exhibited reproducible structural features on several size scales which correlate with the variation of laser energy and the effects of excited ion etching.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 358: Symposium F – Microcrystalline and Nanocrystalline Semiconductors , 1994 , 863
Copyright
Copyright © Materials Research Society 1995

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References

REFERENCES

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