Hostname: page-component-586b7cd67f-rcrh6 Total loading time: 0 Render date: 2024-11-28T13:38:53.984Z Has data issue: false hasContentIssue false
  • English
  • Français

A Study of Ta2O5 for use as High Temperature Piezoelectric Sensors

Published online by Cambridge University Press:  10 February 2011

B. R. Jooste  and
H. J. Viljoen
B. R. Jooste
Affiliation:
Department of Chemical Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588–0126, Tel: (402) 472–9318, Fax: (402) 472–6989
H. J. Viljoen
Affiliation:
Department of Chemical Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588–0126, Tel: (402) 472–9318, Fax: (402) 472–6989
Get access

Abstract

Acoustic sensors which can function at high temperatures have important potential uses. In this work we report on the deposition, characterization and qualitative assessment of piezoelectric behaviour of orthorhombic Ta2O5• It is shown that orthorhombic Ta2O5 belongs to the class 2mm. XRD analysis of films annealed for 1 min., 10 min. and 1 hr at 800°C and 900°C reveal the formation of (0 0 1), (1 10 0) and (1 11 0) orientations at 800 °C, but the (1 10 0) increases at the expense of the other two as the annealing period is extended. At 900°C the dominant orientations are (1 10 0) and (2 9 0). The piezoelectric effect is significantly stronger after annealing and the stronger piezoelectric effect does not correlate with the presence of (1 10 0) and (2 9 0) so much as with the absence of (0 0 1) and (1 11 0).

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 459: Symposium Y – Materials for Smart Systems II , 1996 , 195
Copyright
Copyright © Materials Research Society 1997

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Lo, G.Q. and Kwong, D.L., Appl. Phys. Lett. 60 (26), pp. 3286–3288 (1992).Google Scholar
2. Nakagawa, Y. and Gomi, Y.., Appl. Phys. Lett. 46, pp. 139–140 (1985).Google Scholar
3. Nakagawa, Y. and Okada, T.., J. Appl. Phys. 68, pp. 556–559 (1990).Google Scholar
4. Jehn, H. and Olzi, E., Journal of the less common metals 27, pp. 297–309 (1972).Google Scholar
5. Harburn, G., Tilley, R.J.D. and Williams, R.P., Philosophical Magazine A 68 (4), pp. 633–640 (1993).Google Scholar
6. Jooste, B.R., Piezoelectric Sensors for Vibration and Damage Detection in Structures: Manufacture, Analysis and Modeling, Masters Thesis, Dept. Chem. Eng., University of Nebraska (1996).Google Scholar
7. Jooste, B.R. and Viljoen, H.J., J. Mater. Res. (to be published).Google Scholar
8. Oehrlein, G.S., d'Heurle, F.M. and Reisman, A., J. Appl. Phys. 55, pp. 3715–3725 (1984).Google Scholar
9. Shimizu, K., Thompson, G.E. and Wood, G.C.., Philosophical Magazine B 63, pp. 891–899 (1991).Google Scholar
10. Pignolet, A., Rao, G.M. and Krupanidhi., S.B., Thin Solid Films 285, pp. 230–235 (1995).Google Scholar