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Structure and Thermodynamics of Amorphous Ti-Si Produced by Solid-State Interdiffusion

Published online by Cambridge University Press:  21 February 2011

Karen Holloway ,
Pierre Moine ,
Jacques Delage ,
Rüdiger Bormann ,
Linda Capuano  and
Robert Sinclair
Karen Holloway
Affiliation:
IBM Thomas J. Watson Research Center, Yorktown Heights, NY 10598
Pierre Moine
Affiliation:
Laboratoire de Metallurgie Physique, University of Poitiers, France
Jacques Delage
Affiliation:
Laboratoire de Metallurgie Physique, University of Poitiers, France
Rüdiger Bormann
Affiliation:
GKSS-Forschungszentrum Geesthacht, Geesthacht, F.R. Germany
Linda Capuano
Affiliation:
Conductus, Sunnyvale, CA
Robert Sinclair
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, CA
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Abstract

The thermodynamic and structural aspects of amorphous titanium silicide formation by solid-state reaction have been addressed. The radial distribution function of an amorphous Ti60Si40 reaction product has been determined by electron diffraction. It is an amorphous metallic alloy, with a coordination number of about 11.4, and a local arrangement of atoms which is similar to that in a crystalline silicide, Ti5Si4. The free energy of the amorphous alloy as a function of composition has been determined from the heats of crystallization of co-deposited amorphous Ti-Si alloys, and the heat of formation of the amorphization product as measured by differential scanning calorimetry (DSC). The latter was measured to be 35 ± 5 kJ/mole. Using these data, free energy of the amorphous Ti-Si phase has been calculated by applying the CALPHAD method. These results are discussed in light of the mechanism and energetics of the amorphization reaction.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 187: Symposium J – Thin Film Structures and Phase Stability , 1990 , 71
Copyright
Copyright © Materials Research Society 1990

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