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Structural Evaluation of Interfaces by Electron Diffraction

Published online by Cambridge University Press:  26 February 2011

Tim D. Sullivan  and
Dieter G. Ast
Tim D. Sullivan
Affiliation:
IBM Burlington, Essex Junction, VT 05452
Dieter G. Ast
Affiliation:
Dept. MS&E, Cornell University, Ithaca NY 14853
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Abstract

A method for extracting quantitative information from weak diffraction features at or near matrix reflections is described. The technique requires an accurate knowledge of the fall-off of the matrix reflection. This fall-off was studied both experimentally and theoretically for a wide range of coherence conditions in the microscope. Subtraction of this matrix contribution from the total intensity of an [004] reflection from a E=13 (001) twist boundary shows that the streak arises from local as well as from long range interference effects. The latter contribution varies with spatial coherence length which depends on the condenser setting of the microscope.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 54 , 1985 , 639
Copyright
Copyright © Materials Research Society 1986

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References

REFERENCES

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