Hostname: page-component-745bb68f8f-mzp66 Total loading time: 0 Render date: 2025-01-12T10:02:00.664Z Has data issue: false hasContentIssue false
  • English
  • Français

Structural and Elastic Properties of HF/ZR Multilayer Thin Films

Published online by Cambridge University Press:  21 February 2011

W. J. Meng ,
G. L. Eesley ,
K. Svinarich  and
G. P. Meisner
W. J. Meng
Affiliation:
Physics Department, General Motors Research Laboratories, Warren, MI 48090
G. L. Eesley
Affiliation:
Physics Department, General Motors Research Laboratories, Warren, MI 48090
K. Svinarich
Affiliation:
Department of Physics and Astronomy, Wayne State University, Detroit, Michigan
G. P. Meisner
Affiliation:
Physics Department, General Motors Research Laboratories, Warren, MI 48090
Get access

Abstract

We have investigated structural and elastic properties of Hf/Zr multilayer thin films by x-ray diffraction and transient piezoreflectance measurements. Similar structural and elastic behaviors have been observed in two series of samples grown at different deposition rates (1 – 10Å/sec). Our measurements suggest different (˜ 10%) effective elastic constants between multilayers with coherent and incoherent interfaces.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 187: Symposium J – Thin Film Structures and Phase Stability , 1990 , 321
Copyright
Copyright © Materials Research Society 1990

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Rytov, S. M., Akust. Zh. 2, 71 (1956) [Soy. Phys. Acoust. 2, 68 (1956)]; M. Grimsditch, Phys. Rev. B 31, 6818 (1985).Google Scholar
2. Yang, W. M. C., Tsakalakos, T., Hilliard, J. E., J. Appl. Phys. 48, 876 (1977).Google Scholar
3. Bell, J. A., Bennett, W. R., Zanoni, R., Stegeman, G. I., Falco, C. M., Nizzoli, F., Phys. Rev. B 35, 4127 (1987); M. R. Khan, C. S. L. Chun, G. P. Felche, M. Grimsditch, A. Kueny, C. M. Falco, I. K. Schuller, Phys. Rev. B 27, 7186 (1983); A. Kueny, M. Grimsditch, K. Miyano, I. Banerjee, C. M. Falco, I. K. Schuller, Phys. Rev. Lett. 48, 166 (1982).Google Scholar
4. Wu, T-B., J. Appl. Phys. 53, 5265 (1982).Google Scholar
5. Merwe, J. H. van der, Jesser, W. A., J. Appl. Phys. 63, 1509; 63, 1928 (1988).Google Scholar
6. Banerjea, A., Smith, J. R., Phys. Rev. B 35, 5413 (1987).Google Scholar
7. Cammarata, R. C., Sieradzki, K., Phys. Rev. Lett. 62, 2005 (1989).Google Scholar
8. Clemens, B. M., Eesley, G. L., Phys. Rev. Lett. 61, 2356 (1988).Google Scholar
9. Eesley, G. L., Clemens, B. M., Paddock, C. A., Appl. Phys. Lett. 50, 717 (1987).Google Scholar
10. Miceli, P. F., Neumann, D. A., Zabel, H., Appl. Phys. Lett. 48, 24 (1986).Google Scholar
11. Makous, J. L., Falco, C. M., Solid State Commun. 72, 667 (1989).Google Scholar