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Stress relaxation and medium-range order in diamond-like amorphous carbon films

Published online by Cambridge University Press:  01 February 2011

Xidong Chen ,
John Sullivan ,
Tom Friedmann  and
Dean Miller
Xidong Chen
Affiliation:
Cedarville University, Cedarville, OH 45314 & Materials Science Division, Argonne National Laboratory, Argonne, IL 60439
John Sullivan
Affiliation:
Nanostructure and Semiconductor Physics Department, Sandia National Laboratories, Albuquerque, NM 87185–1421
Tom Friedmann
Affiliation:
Nanostructure and Semiconductor Physics Department, Sandia National Laboratories, Albuquerque, NM 87185–1421
Dean Miller
Affiliation:
Materials Science Division, Argonne National Laboratory, Argonne, IL 60439
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Abstract

In this paper, we have studied the relationship between medium-range order structures in and stress relaxation in amorphous diamond-like carbon films with fluctuation microscopy. Our preliminary results show strong correlation between stress relaxation and medium-range order. Our previous results showed that annealing films that had been through stress relaxation procedures caused great increase of medium-ranger order. In this paper, we have found that the increase of medium-range order in films that have been annealed before going through stress relaxation through removal of substrates is less pronounced than that of films that have been annealed after removal of substrates. We will discuss interpretations and implications of these results.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 839: Symposium P – Electron Microscopy of Molecular and Atom-Scale Mechanical Behavior, Chemistry, and Structure , 2004 , P5.5
Copyright
Copyright © Materials Research Society 2004

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References

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