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Sputtering Luminescent Ta2Zn3O8 Thin Films

Published online by Cambridge University Press:  10 February 2011

Philip D. Rack ,
Michael D. Potter ,
Andrew Woodard  and
Santosh Kurinec
Philip D. Rack
Affiliation:
Advanced Vision Technologies, Inc., 150 Lucius Gordon Drive, Suite 215 West Henrietta, NY 14586, Email – [email protected]
Michael D. Potter
Affiliation:
Advanced Vision Technologies, Inc., 150 Lucius Gordon Drive, Suite 215 West Henrietta, NY 14586, Email – [email protected]
Andrew Woodard
Affiliation:
Microelectronic Engineering, Rochester Institute of Technology, Rochester, NY 14623
Santosh Kurinec
Affiliation:
Microelectronic Engineering, Rochester Institute of Technology, Rochester, NY 14623
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Abstract

Thin films have been deposited by rf magnetron sputtering from a stoichiometric Ta2Zn3O8 ceramic target (3ZnO + 1Ta2O5). Negative ion re-sputtering effects have been observed in the stoichiometric Ta2Zn3O8 target and have been attributed to O ion formation from primarily Ta-O bonds. Zinc deficient thin films were deposited as a result of the preferential re- sputtering of Zn versus Ta. The negative ion re-sputtering effects are exacerbated at higher powers and lower pressure. This observation is correlated to the oxygen ion transport through the dark space and the plasma, which ultimately controls the energy distribution of the oxygen particles that arrive at the substrate. To circumvent the negative ion re-sputtering, a mosaic ZnO-Ta target was sputtered, which resulted in stoichiometric and luminescent thin films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 560: Symposium E – Luminescent Materials , 1999 , 75
Copyright
Copyright © Materials Research Society 1999

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References

REFERENCES

1. Feldman, C. and O'Hare, M., Journal of the Optical Society of America, 47, p300 (1957).Google Scholar
2. Sella, C., Martin, J. and Charreire, Y., Thin Solid Films 90, p181, (1982).Google Scholar
3. Jones, S.L., Phd. Dissertation, University of Florida, (1998).Google Scholar
4. Langley, R.J., Pettis, G.F., Kurinec, S.K. and Potter, M.D., Proceedings of the Second International Conference on the Science and Technology of Display Phosphors, November 1996, San Diego, CA, p133.Google Scholar
5. Kurinec, S.K and Potter, M.D., SID Digest, May 1997, Boston, MA, p1077.Google Scholar
6. Rack, Philip D., Potter, Michael D., Kurinec, Santosh, Park, Wounjhang, Penczek, John, Wagner, Brent K. and Summers, Christopher J., Journal of Applied Physics, in press.Google Scholar
7. Honig, R.E., Journal of Applied Physics, 29, p549, (1958).Google Scholar
8. Hanak, J.J. and Pellicane, J.P., Journal of Vacuum Science and Technology, 13, p406, (1976).Google Scholar
9. Cuomo, J.J., Gambino, R.J., Harper, J.M.E., Kuptsis, J.D. and Webber, J.C., Journal of Vacuum Science and Technology, 15(2), p281, (1978).Google Scholar
10. Harper, J.M.E., Cuomo, J.J, Gambino, R.J., Kaufman, H.R. and Robinson, R.S., Journal of Vacuum Science and Technology, 15(4), p 1597, (1978).Google Scholar
11. Kester, D.J. and Messier, R., Journal of Vacuum Science and Technology A, 4(3), p496, (1986).Google Scholar
12. Tominaga, T., Kume, M., Yuasa, T. and Tada, O., Japanese Journal of Applied Physics, 24, p34, (1984).Google Scholar
13. Massey, H.S.W. and Gilbody, H.B., Electronic and Ionic Impact Phenomena (Clarendon, Oxford, 1974), Vol. IV, p 2812.Google Scholar
14. Robinson, R.S., Journal of Vacuum Science and Technology, 16, p185, (1978).Google Scholar
15. See for example Thornton, J.A, in Semiconductor Materials and Process Technology for VLSI and ULSI, edited by McGuire, G.E., (Noyles Publications, Park Ridge, New Jersey, 1982) p372.Google Scholar