Hostname: page-component-745bb68f8f-b6zl4 Total loading time: 0 Render date: 2025-01-27T02:17:35.695Z Has data issue: false hasContentIssue false
  • English
  • Français

Solid Solution Alloy Effects on Microstructure and Indentation Hardness in Pt-Ru Thin Films

Published online by Cambridge University Press:  18 March 2011

Seungmin Hyun ,
Oliver Kraft  and
Richard P. Vinci
Seungmin Hyun
Affiliation:
Department of Materials Science and Engineering, Lehigh University, Bethlehem, Pennsylvania 18015
Oliver Kraft
Affiliation:
Max Planck Institut fur Metallforschung, Stuttgart, Germany
Richard P. Vinci
Affiliation:
Department of Materials Science and Engineering, Lehigh University, Bethlehem, Pennsylvania 18015
Get access

Abstract

The elastic moduli and flow stresses of as-deposited Pt and Pt-Ru solid solution thin films were investigated by the nanoindentation method. The influence of solid solution alloying was explored by depositing Pt-Ru solid solution thin films with various compositions onto Si substrates. The 200 nm films were prepared by DC magnetron cosputtering with a Ru composition range from 0 to 20wt%. As expected, the modulus and the flow stress both increased significantly with an increase in Ru. The experimental results compare favorably to predictions based on a simple dislocation motion model consisting of three strengthening terms: substrate constraint, grain size strengthening and solid solution strengthening.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 673: Symposium P – Dislocations and Deformation Mechanisms in Thin Films and Small Structures , 2001 , P3.2
Copyright
Copyright © Materials Research Society 2001

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Metals Handbook, 'Properties and Selection; Nonferrous alloys and special purpose materials, 2, 707 (1990).Google Scholar
2. Binary Alloy Phase Diagrams, ed. Massalski, T.B., 2nd edition, ASM International (1992).Google Scholar
3. Vinci, R.P., Zielinski, E.M., and Bravman, J.C., Mat.Res.Soc.Symc.Proc., 356, 459 (1995).Google Scholar
4. Venkatraman, R. and Bravman, J.C, J.Mater.Res., 7, 2040 (1992).Google Scholar
5. Oliver, W.C. and Pharr, G.M., J.Mater.Res., 7, 1564 (1992).Google Scholar
6. Grimvall, G., Thermophysical Properties of Materials, North-Holland (1986).Google Scholar
7. Bahr, D.F., Crowson, D.A., Robach, J.S. and Gerberich, W.W., Mat. Res. Soc. Symp. Proc. 505, 85 (1997).Google Scholar
8. Tabor, D., The Hardness of Metals, Oxford at the Clarendon Press (1951)Google Scholar
9. Nix, W.D., Metal. Trans.A. 20A, 2217 (1989).Google Scholar
10. Freun, L.B.d, J.Appl. Mech. 54, 553 (1987).Google Scholar
11. Sevillano, J.G., Materials Science and Technology, Vol6, ed. Mughrabi, H., VCH (1993).Google Scholar
12. Labusch, R., Phys., Stat., Sol., 41, 659 (1970)Google Scholar
13. Haasen, Peter, Physical Metallurgy, Cambridge Univ.Press (1996)Google Scholar