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Single Crystal CVD Diamond growth and characterizations

Published online by Cambridge University Press:  01 February 2011

Nicolas Olivier Tranchant ,
Dominique Tromson ,
Zdenek Remes ,
Licinio Rocha ,
Milos Nesladek  and
Philippe Bergonzo
Nicolas Olivier Tranchant
Affiliation:
[email protected], CEA SAclay, DRT/LIST/DETECS/SSTM, CEA Saclay, DRT/LIST/DETECS/SSTM/LTD, Bât 451, pce 74, Gif-Sur-Yvette, Gif-Sur-Yvette, 91400, France, +33169084417
Dominique Tromson
Affiliation:
[email protected], CEA SAclay, DRT/LIST/DETECS/SSTM, CEA Saclay, DRT/LIST/DETECS/SSTM/LTD, Bât 451, pce 74, Gif-Sur-Yvette, Gif-Sur-Yvette, 91400, France
Zdenek Remes
Affiliation:
[email protected], Institute of Physics, Academy of Sciences of the Czech Republic, Praha, N/A, Croatia
Licinio Rocha
Affiliation:
[email protected], CEA SAclay, DRT/LIST/DETECS/SSTM, CEA Saclay, DRT/LIST/DETECS/SSTM/LTD, Bât 451, pce 74, Gif-Sur-Yvette, Gif-Sur-Yvette, 91400, France
Milos Nesladek
Affiliation:
[email protected], CEA SAclay, DRT/LIST/DETECS/SSTM, CEA Saclay, DRT/LIST/DETECS/SSTM/LTD, Bât 451, pce 74, Gif-Sur-Yvette, Gif-Sur-Yvette, 91400, France
Philippe Bergonzo
Affiliation:
[email protected], CEA SAclay, DRT/LIST/DETECS/SSTM, CEA Saclay, DRT/LIST/DETECS/SSTM/LTD, Bât 451, pce 74, Gif-Sur-Yvette, Gif-Sur-Yvette, 91400, France
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Abstract

Due to its radiation harness, single crystal CVD diamond is a remarkable material for the construction of detectors used in hadron physics and for medical therapy. In this work, single crystal CVD diamond plates were grown in a microwave plasma reactor, using home design substrate holder and a relatively high pressure. Optical Emission Spectroscopy was employed during the MW-PECVD growth to characterize excited species present in the plasma and to detect the presence of residual gases such as nitrogen which is unsuitable for detector's applications.

The samples were characterized using various methods such as Raman spectroscopy, photoluminescence (PL), photocurrent spectroscopy, Raman mapping, birefringence microscopy, optical microscopy and also AFM. The best sample, exhibits a FWHM for the 1332 cm−1 Raman peak about 1.6 cm−1. Room temperature PL spectra showed no N–related luminescence, confirming the high quality of the grown single crystal diamond.

Keywords

crystal growthdiamondchemical vapor deposition (CVD) (deposition)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 956: Symposium J – Diamond Electronics—Fundamentals to Applications , 2006 , 0956-J07-02
Copyright
Copyright © Materials Research Society 2007

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References

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