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Silicon Platform for Mid-infrared Optofluidic Sensors

Published online by Cambridge University Press:  13 March 2013

Pao Lin ,
Hao-Yu Greg Lin ,
Vivek Singh ,
Neil Sunil Patel ,
Lionel Kimerling  and
Anuradha Murthy Agarwal
Pao Lin
Affiliation:
Microphotonics Center, MIT, Cambridge, Massachusetts, USA.
Hao-Yu Greg Lin
Affiliation:
Harvard University, Cambridge, Massachusetts, USA.
Vivek Singh
Affiliation:
Microphotonics Center, MIT, Cambridge, Massachusetts, USA.
Neil Sunil Patel
Affiliation:
Microphotonics Center, MIT, Cambridge, Massachusetts, USA.
Lionel Kimerling
Affiliation:
Microphotonics Center, MIT, Cambridge, Massachusetts, USA.
Anuradha Murthy Agarwal
Affiliation:
Microphotonics Center, MIT, Cambridge, Massachusetts, USA.
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Abstract

Mid-Infrared optofluidics based silicon sensor platforms are demonstrated. Silicon is a great candidate for mid-infrared optofluidics for the following reasons: (1) Silicon has a broad transmission window up to 7 um (2) Silicon offers CMOS compatible and monolithic fabrication (3) Silicon has high chemical resistance that can withstand high temperature, acid/base solution and organic solvents. (4) Silicon is a non-toxic environmentally friendly material. The fabricated mid-infrared optofluidic sensor can replace bulky instruments, such as FTIR, with a lab-on-a-chip system, while achieving much higher sensitivity.

Keywords

Sisensoroptical
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1510: Symposium DD – Group IV Semiconductor Nanostructures and Applications , 2013 , mrsf12-1510-dd14-02
Copyright
Copyright © Materials Research Society 2013

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References

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