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Self-aligned Split Gate Electrodes Fabricated on Suspended Carbon Nanotubes

Published online by Cambridge University Press:  11 February 2011

S.-B. Lee ,
L.A.W. Robinson ,
K.B.K. Teo ,
M. Chhowalla ,
G.A.J. Amaratunga ,
W.I. Milne ,
D.G. Hasko  and
H. Ahmed
S.-B. Lee
Affiliation:
Microelectronics Research Centre, Cavendish Laboratory, University of Cambridge, Madingley Road, Cambridge, CB3 0HE, United Kingdom
L.A.W. Robinson
Affiliation:
Microelectronics Research Centre, Cavendish Laboratory, University of Cambridge, Madingley Road, Cambridge, CB3 0HE, United Kingdom
K.B.K. Teo
Affiliation:
Engineering Department, University of Cambridge, Trumpington Street, Cambridge, CB2 1PZ, United Kingdom
M. Chhowalla
Affiliation:
Engineering Department, University of Cambridge, Trumpington Street, Cambridge, CB2 1PZ, United Kingdom
G.A.J. Amaratunga
Affiliation:
Engineering Department, University of Cambridge, Trumpington Street, Cambridge, CB2 1PZ, United Kingdom
W.I. Milne
Affiliation:
Engineering Department, University of Cambridge, Trumpington Street, Cambridge, CB2 1PZ, United Kingdom
D.G. Hasko
Affiliation:
Microelectronics Research Centre, Cavendish Laboratory, University of Cambridge, Madingley Road, Cambridge, CB3 0HE, United Kingdom
H. Ahmed
Affiliation:
Microelectronics Research Centre, Cavendish Laboratory, University of Cambridge, Madingley Road, Cambridge, CB3 0HE, United Kingdom
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Abstract

We describe the fabrication of self-aligned split gate electrodes on suspended multiwalled carbon nanotube structures. A suspended multiwalled carbon nanotube structure was used as an evaporation mask for the deposition of metal electrodes resulting in the formation of discontinuous wire deposition. The metal deposits on the nanotubes are removed with lift-off due to the poor adhesion of metal to the nanotube surface. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gaped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 741: Symposium J – Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines , 2002 , J7.2
Copyright
Copyright © Materials Research Society 2003

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References

REFERENCES

1. Wong, E.W., Sheehan, P.E. and Lieber, CM., Science, 277, 1971 (1997).Google Scholar
2. Cumings, J and Zettl, A., Science, 289, 602 (2000).Google Scholar
3. Baughman, R. H., Cui, C., Zakhidov, A.A., Iqbal, Z., Barisci, J.N., Spinks, G.M., Wallace, G.G., Mazzoldi, A., De Rossi, D., Rinzler, A.G., Jaschinski, O., Roth, S. and Kertesz, M., Science, 284, 1340 (1999).Google Scholar
4. Lee, S.-B., Teo, K.B.K., Chhowalla, M., Hasko, D.G., Amaratunga, G.A.J., Milne, W.I. and Ahmed, H., Microelectron. Eng. 60–61, 475 (2002).Google Scholar
5. Kim, G-T., Gu, G., Waizmann, U. and Roth, S., Appl. Phys. Lett. 80, 1815 (2002).Google Scholar
6. Nygård, Jesper and Cobden, David H., Appl. Phys. Lett. 79, 4216 (2001).Google Scholar
7. Park, J.W., Choi, J.B. and Yoo, K.-H., Appl. Phys. Lett. 81, 2644 (2002).Google Scholar
8. Suzuki, M., Ishibashi, K., Ida, T., Tsuya, D., Toratani, K., and Aoyagi, Y., J. Vac. Sci. Technol. B19, 2770 (2001).Google Scholar
9. Zhang, Y., Franklin, N.W., Chen, RJ. and Dai, H., Chem. Phys. Lett. 331, 35 (2000).Google Scholar
10. Zheng, Y. and Dai, H, Appl. Phys. Lett. 77, 3015 (2000).Google Scholar
11. Lefebvre, J., Radosavljević, M., and Johnson, A. T., Appl. Phys. Lett. 76, 3828 (2000).Google Scholar