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Roll-to-Roll Nanoimprinting Metamaterials

Published online by Cambridge University Press:  22 May 2012

Anton Greenwald ,
Jae Ryu ,
Yisi Liu ,
Rana Biswas ,
Jong Ok ,
Hongseok Youn ,
Moonkyu Kwak ,
Myung-Gyu Kang  and
L. Jay Guo
Anton Greenwald
Affiliation:
Agiltron Inc., 15 Presidential Way, Woburn, MA.
Jae Ryu
Affiliation:
Agiltron Inc., 15 Presidential Way, Woburn, MA.
Yisi Liu
Affiliation:
Agiltron Inc., 15 Presidential Way, Woburn, MA.
Rana Biswas
Affiliation:
Microelectronics Research Center, Iowa State University, Ames, Iowa 50011, USA
Jong Ok
Affiliation:
University of Michigan, Ann Arbor, MI, USA
Hongseok Youn
Affiliation:
University of Michigan, Ann Arbor, MI, USA
Moonkyu Kwak
Affiliation:
University of Michigan, Ann Arbor, MI, USA
Myung-Gyu Kang*
Affiliation:
University of Michigan, Ann Arbor, MI, USA
L. Jay Guo
Affiliation:
University of Michigan, Ann Arbor, MI, USA
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Abstract

We investigated continuous fabrication of a large area 2-D metamaterial comprising a metal dot array on a dielectric coated substrate. We demonstrated patterning of metal dots arrays of varying patterns and shapes with diameter of about 2.5 μm and metal-to-metal spacing from 0.3 to 2.5 μm using a nano-imprinting stamp on a roller. The pattern was first fabricated on a standard photolithography mask, reproduced onto a silicon wafer master mold, and then transferred to a flexible polymer mold that was wrapped around a metal roller. The method was used to pattern a thin Al layer on top of SiO2 on a flexible polymer substrate. The aluminum was coated with a resist and the roller moved over the substrate with adjustable speed and pressure to imprint the fine pattern into the resist. The resist was cured, and a very thin layer of residual resist was removed by RIE, followed by a standard etching treatment for patterning the aluminum layer.

The as-etched pattern had very few defects and the optical properties of the metamaterial were excellent and correlated well with simulations. This work has shown that low cost, rapid roll-to-roll processing of 2-D metamaterial structures is possible.

Keywords

lithography (removal)nanostructureoptical properties
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1412: Symposium FF – Mechanical Nanofabrication, Nanopatterning and Nanoassembly , 2012 , mrsf11-1412-ff01-04
Copyright
Copyright © Materials Research Society 2012

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References

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