Hostname: page-component-586b7cd67f-vdxz6 Total loading time: 0 Render date: 2024-11-28T21:02:45.606Z Has data issue: false hasContentIssue false
  • English
  • Français

Research on Amorphous Silicon Thin-Film Structure and Growth Processes Using Nonlinear Dynamics Methods

Published online by Cambridge University Press:  01 February 2011

Nikolay Viktorovich Bodyagin ,
Sergey Pavlovich Vikhrov ,
Tatiana Gennadievna Larina  and
Stanislav Mursalovich Mursalov
Sergey Pavlovich Vikhrov
Affiliation:
[email protected], Ryazan State Radioengineering University, Chare of Biomedical and Semiconductor Electronics, 59/1 Gagarina st., Ryazan, N/A, 390005, Russian Federation
Tatiana Gennadievna Larina
Affiliation:
[email protected] State Radioengineering UniversityChare of Biomedical and Semiconductor Electronics59/1 Gagarina st.RyazanN/A390005Russian Federation
Stanislav Mursalovich Mursalov
Affiliation:
[email protected], Ryazan State Radioengineering University, Chare of Biomedical and Semiconductor Electronics, 59/1 Gagarina st., Ryazan, N/A, 390005, Russian Federation
Get access

Abstract

There proved a possibility of applying the self-organization theory to the growth of noncrystalline thin-films and to the detection of ordering in their structure. Methods of analyzing the dynamics of complex systems are modified so as to investigate the structure of noncrystalline thin films. There offered new principles of the construction of material growth control systems.

Keywords

amorphousfilmnanostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 910: Symposium A – Amorphous and Polycrystalline Thin-Film Silicon Science and Technology – 2006 , 2006 , 0910-A05-01
Copyright
Copyright © Materials Research Society 2006

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Abarbanel, H.D.I., Brrown, R., Sidorowich, J.J., Tsimring, L.S., Rev. of Mod. Phys. 4, 1331 (1993).Google Scholar
2. Aivazov, A.A., Bodyagin, N.V., Vikhrov, S.P., Petrov, S.V., J. Non-Cryst. Solids, 114, 157 (1989).Google Scholar
3. Grassberger, P., Phys. Scripta, 40, 346, (1989).Google Scholar
4. Tsimring, L.S., Phys. Rev. B, 5, 3421 (1993).Google Scholar
5. Bodyagin, N.V., Vikhrov, S.P., Mursalov, S.M. and Tarasov, I.V., Microelectronics, 4(31), 307 (2002).Google Scholar
6. Vikhrov, S.P., Bodyagin, N.V., Larina, T.G. and Mursalov, S.M., Semiconductors, 39 (8), 917 (2005).Google Scholar