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Process Modeling Of The Laser Induced Surface Modification Of Ceramic Substrates For Thermal And Electrical Lines In Microsystems

Published online by Cambridge University Press:  10 February 2011

Herbert Gruhn ,
Roland Heidinger ,
Magnus Rohde ,
Sabine Rüdiger ,
Johannes Schneider  and
Karl-Heinz Zum Gahr
Herbert Gruhn
Affiliation:
Forschungszentrum Karlsruhe, Institute for Materials Research I, P.O.B. 3640, 76021 Karlsruhe, Germany
Roland Heidinger
Affiliation:
Forschungszentrum Karlsruhe, Institute for Materials Research I, P.O.B. 3640, 76021 Karlsruhe, Germany
Magnus Rohde
Affiliation:
Forschungszentrum Karlsruhe, Institute for Materials Research I, P.O.B. 3640, 76021 Karlsruhe, Germany
Sabine Rüdiger
Affiliation:
Forschungszentrum Karlsruhe, Institute for Materials Research I, P.O.B. 3640, 76021 Karlsruhe, Germany
Johannes Schneider
Affiliation:
Universität Karlsruhe (TH), Institute of Materials Science and Engineering II, P.O.B. 3640, 76021 Karlsruhe, Germany
Karl-Heinz Zum Gahr
Affiliation:
Universität Karlsruhe (TH), Institute of Materials Science and Engineering II, P.O.B. 3640, 76021 Karlsruhe, Germany
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Abstract

Laser induced surface modification has been used to fabricate conducting paths in ceramic substrates. For the purpose of process simulation and prediction of process parameters a finite element model has been developed to simulate the thermal behaviour of the substrate during laser surface interaction. The results of the model calculation have been verified experimentally for alumina and Cordierite substrates. Using this model the width and the depth of the fabricated lines could be predicted as a function of the laser power and velocity. The stresses due to thermal mismatch are estimated and identified as the likely reason for crack formation which reduces the functionality of the conducting paths. Further developments will consider different ceramic substrates such as PZT.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 617: Symposium J – Laser-Solid Interactionsfor Materials Processing , 2000 , J5.3
Copyright
Copyright © Materials Research Society 2000

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References

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