Hostname: page-component-78c5997874-94fs2 Total loading time: 0 Render date: 2024-11-02T23:03:28.024Z Has data issue: false hasContentIssue false
  • English
  • Français

Piezoelectric Films and Coatings for Device Purposes

Published online by Cambridge University Press:  10 February 2011

Michael Sayer ,
Marc Lukacs ,
Tim Olding ,
Guofeng Pang ,
Lichun Zou  and
Yan Chen
Michael Sayer
Affiliation:
Department of Physics, Queen's University, Kingston, ON K7L 3N6, Canada
Marc Lukacs
Affiliation:
Department of Physics, Queen's University, Kingston, ON K7L 3N6, Canada
Tim Olding
Affiliation:
Department of Physics, Queen's University, Kingston, ON K7L 3N6, Canada
Guofeng Pang
Affiliation:
Department of Physics, Queen's University, Kingston, ON K7L 3N6, Canada
Lichun Zou
Affiliation:
Department of Physics, Queen's University, Kingston, ON K7L 3N6, Canada
Yan Chen
Affiliation:
Department of Physics, Queen's University, Kingston, ON K7L 3N6, Canada
Get access

Abstract

Piezoelectric devices generally require film thicknesses in the range 2-200µm and have a response which is perturbed by the substrate. Sol gel and sol gel composite technology provide a manufacturable process for many purposes with a piezoelectric coupling coefficient for 40ptm thick PZT approaching kt= 0.34. Techniques such as laser machining or micromolding are required for patterning thick devices. Measurement and applications of piezoelectric coatings in medical imaging, high temperature ultrasonics and flexure devices are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 541: Symposium O – Ferroelectric Thin Films VII , 1998 , 599
Copyright
Copyright © Materials Research Society 1999

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Barrow, D.A., Noteboom, R. and Sayer, M., Integ.Ferroelect., 8, 1 (1995)Google Scholar
[2] Dieulesaint, E. and Royer, D., Elastic Waves in Solids; Applications to Signal Processing, John Wiley & Sons (1980)Google Scholar
[3] Noteboom, R., Sayer, M. and Barrow, D.A.,Proc. 10th ISAF, IEEE, 951 (1996)Google Scholar
[4] Park, S.E. and Shrout, T.E., IEEE Trans. UFFC 44,1140 (1997)Google Scholar
[5] Yi, G., Sayer, M., and Wu, Z., J. Applied Phys 64, 2717 (1988), G. Yi and M. Sayer, Proc. ISAF'92 (1992).Google Scholar
[6] Haertling, G.H., Ferroelectrics 119, 21 (1991)Google Scholar
[7] Chen, H.D. et al. , J.Amer.Ceram. Soc. 79, 2189 (1996).Google Scholar
[8] Schwartz, R.W., Assink, R.A., and Headley, T.J., Mat. Res.Soc. Symp. Proc. 243, 245 (1992)Google Scholar
[9] Tu, Y.L. and Milne, S.J., J. Mat. Res., 10 (12), 3222 (1995)Google Scholar
[10] Budd, K.D., Dey, S.K., and Payne, D.A., Brit. Ceram. Proc. 36, 105 (1985)Google Scholar
[11] Olding, T.R., to be submitted to Integrated FerroelectricsGoogle Scholar
[12] Haertling, G.H., Integ. Ferroelectr. 14, 219 (1997)Google Scholar
[13] Barrow, D.A., Petroff, T.E., Tandon, R. and Sayer, M., J.Appl.Phys. 81,276 (1997)Google Scholar
[14] Barrow, D.A., Petroff, T.E. and Sayer, M., US Patent # 5,858,136 (Assigned to Datec Coating Corporation, 851 Nipissing Road, Milton, ON L9T 4Z4)Google Scholar
[15] Ferroperm Aktieselskab, Hejreskovvej 18 A, DK-3490, Kvistgaard, DenmarkGoogle Scholar
[16] Uchino, K., Nishida, S. and Nomera, S., Jap.J.Appl. Phys/ 21, 596 (1982)Google Scholar
[17] Smits, J.G., Choi, W. and Ballato, A. IEEE Trans. UFFC 44, 250 (1991)Google Scholar
[18] Lukacs, M., Olding, T., Sayer, M., Sherrit, S., MRS Proc. 493, 145 (1998)Google Scholar
[19] Tasi Technical Software (1998) Piezoelectric Resonance Analysis Progam http://www.canlink.com/tasi/tasi.html, Kingston, Ontario, CanadaGoogle Scholar
[20] Asselanis, D. and Maucha, S.D. US Patent #4,759,823 (1988)Google Scholar
[21] Lau, W.M., Bello, I., Sayer, M. and Zou, Li (1994), Appl. Phys. Lett., 64, 300 (1994)Google Scholar
[22] Lukacs, M., Ph.D Thesis 1999, Queen's UniversityGoogle Scholar
[23] Ehrfield, W., Microsystems Technologies, 90, 521 (1990)Google Scholar
[24] Noteboom, R., M.Sc. Thesis, Queen's University (1995)Google Scholar
[25] Barrow, D.A., Lisboa, O., Jen, C-K and Sayer, M., J.Appl.Phys 79, 3323 (1996)Google Scholar
[26] Sedlar, M., Paulika, I. and Sayer, M., Appl.Optics 35, 5340 (1996)Google Scholar
[27] Lukacs, M., Sayer, M. and Foster, S., Medical Imaging '98 Symp. SPIE 1998, submitted to IEEE Trans:UFFC 1999Google Scholar
[28] Lockwood, G.R., Turnbull, D. and Foster, F.S., IEEE Trans on UFFC, 41, 231 (1994)Google Scholar
[29] Lukacs, M., Ph.D Thesis, Queen's University 1999 Google Scholar
[30] Chen, Y., Sayer, M., Zou, L. and Jen, C-K, MRS Proc. Boston, December 1998 Google Scholar