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A Novel Technique for the Fabrication of Free-Standing Adhesive Films Using a Polymer Template

Published online by Cambridge University Press:  10 February 2011

D. J. Hansford ,
L. P. Lee  and
M. Ferrari
D. J. Hansford
Affiliation:
Biomedical Microdevices Center, 440 Evans Hall, University of California, Berkeley, CA 94720 Department of Materials Science and Mineral Engineering, U.C. Berkeley, CA 94720
L. P. Lee
Affiliation:
Biomedical Microdevices Center, 440 Evans Hall, University of California, Berkeley, CA 94720 Applied Science and Technology Program, U.C. Berkeley, CA 94720
M. Ferrari
Affiliation:
Biomedical Microdevices Center, 440 Evans Hall, University of California, Berkeley, CA 94720 Department of Materials Science and Mineral Engineering, U.C. Berkeley, CA 94720 Department of Civil and Environmental Engineering, U.C. Berkeley, CA 94720
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Abstract

A technique has been developed that allows the application of free-standing membranes of polymer adhesives used in microfabricated structures. The film is made free-standing by the application of the adhesive to a polymer template, followed by an adhesion step to a microfabricated substrate, and the final release of the film by the removal of the polymer template. It was found that the surface treatment used to treat the Teflon template made it adhere too strongly to the adhesive film for this application. The results show that Gel-Paks make a suitable template for the transference of polymer films over holes of at least micron size.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 518: Symposium N – Microelectromechanical Structures for Materials Research , 1998 , 111
Copyright
Copyright © Materials Research Society 1998

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