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Novel Differential Surface Stress Sensor for Detection of Chemical and Biological Species

Published online by Cambridge University Press:  01 February 2011

Kyungho Kang  and
Pranav Shrotriya
Kyungho Kang
Affiliation:
[email protected], Iowa State University, Mechanical Engineering Department, 2025 Black Engineering Building, Ames, IA, 50011, United States
Pranav Shrotriya
Affiliation:
[email protected], Iowa State University, Mechanical Engineering Department, 2025 Black Engineering Building, Ames, IA, 50011, United States
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Abstract

A miniature sensor consisting of two adjacent micromachined cantilevers (a sensing/reference pair) is developed for detection of chemical and biological species. A novel interferometric technique is utilized to measure the differential bending of sensing cantilever with respect to reference. Presence of species is detected by measuring the differential surface stress associated with adsorption/absorption of chemical species on sensing cantilever. Surface stress associated with formation of alkanethiol self-assembled monolayers (SAMs) on the sensing cantilever is measured to characterize the sensor performance.

Keywords

sensorself-assemblymicroelectro-mechanical (MEMS)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1052: Symposium DD – Microelectromechanical Systems–Materials and Devices , 2007 , 1052-DD05-10
Copyright
Copyright © Materials Research Society 2008

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