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Near-Edge X-ray Absorption Fine Structure of Hard Carbon Film Formed by Gas Cluster Ion Beam Assisted Deposition

Published online by Cambridge University Press:  21 March 2011

Kazuhiro Kanda ,
Yutaka Shimizugawa ,
Yuichi Haruyama ,
Isao Yamada ,
Shinji Matsui ,
Teruyuki Kitagawa ,
Mititaka Terasawa ,
Harushige Tsubakino ,
Tatsuo Gejo  and
Masao Kamada
Kazuhiro Kanda
Affiliation:
Himeji Institute for Technology, Laboratory of Advanced Science and Technology for Industry, Kamigori, Hyogo 678-1205, Japan.
Yutaka Shimizugawa
Affiliation:
Himeji Institute for Technology, Laboratory of Advanced Science and Technology for Industry, Kamigori, Hyogo 678-1205, Japan.
Yuichi Haruyama
Affiliation:
Himeji Institute for Technology, Laboratory of Advanced Science and Technology for Industry, Kamigori, Hyogo 678-1205, Japan.
Isao Yamada
Affiliation:
Himeji Institute for Technology, Laboratory of Advanced Science and Technology for Industry, Kamigori, Hyogo 678-1205, Japan. Collaborative Research Center for Cluster Ion Beam Process Technology, Kyoto University, Sakyo, Kyoto 606-8501, Japan.
Shinji Matsui
Affiliation:
Himeji Institute for Technology, Laboratory of Advanced Science and Technology for Industry, Kamigori, Hyogo 678-1205, Japan.
Teruyuki Kitagawa
Affiliation:
Himeji Institute for Technology, Faculty of Engineering, Himeji, Hyogo 671-2201, Japan.
Mititaka Terasawa
Affiliation:
Himeji Institute for Technology, Faculty of Engineering, Himeji, Hyogo 671-2201, Japan.
Harushige Tsubakino
Affiliation:
Himeji Institute for Technology, Faculty of Engineering, Himeji, Hyogo 671-2201, Japan.
Tatsuo Gejo
Affiliation:
Institute for Molecular Science, Okazaki, Aichi 444-8585, Japan.
Masao Kamada
Affiliation:
Institute for Molecular Science, Okazaki, Aichi 444-8585, Japan.
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Abstract

The coordination of the carbon atoms in the diamond-like carbon (DLC) films formed by Ar gas cluster ion beam (GCIB) assisted deposition of fullerene was investigated using synchrotron radiation. Near-edge x-ray absorption fine structure (NEXAFS) spectra of the carbon K-edge of the DLC films formed by various methods were measured over the excitation energy range 275-320 eV, using synchrotron radiation. On the basis of the analysis of the peak corresponding the transition of the excitation electron from carbon 1s orbital to Φ orbital, relative sp2 contents of various DLC films were determined. The DLC films formed by Ar GCIB assisted fullerene deposition were found to consist of a high sp3 hybridized carbon.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 695: Symposium L – Thin Films: Stresses and Mechanical Properties IX , 2001 , L3.25.1
Copyright
Copyright © Materials Research Society 2002

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References

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