Hostname: page-component-586b7cd67f-dlnhk Total loading time: 0 Render date: 2024-11-24T20:01:30.143Z Has data issue: false hasContentIssue false
  • English
  • Français

Near surface characteristics of highly sensitive metal oxide thin films

Published online by Cambridge University Press:  01 February 2011

G. Kiriakidis
G. Kiriakidis*
Affiliation:
Institute of Electronic Structure and Laser, Foundation for Research & Technology-Hellas, P.O.Box 1527 Vasilika Vouton, 711 10 Heraklion, Crete, Greece
Get access

Abstract

We present the gas sensing properties of InOx thin films deposited by dc sputtering and ZnOx thin films deposited both by dc sputtering and PLD. The sensitivity of the films towards ozone is correlated with the deposition parameters like film thickness, substrate deposition temperature and growth rate. Secondary Ion Mass Spectrometry (SIMS) analysis showed a noticeable deficit in oxygen in the top 5 nm for films in the “conducting” state, i.e., after UV exposure. Analysis of the sensing response for alumina-based transducers of InOx thin films revealed high sensitivity (less than 25 ppb) with fast and stable response towards ozone while ultimate sensitivity levels down to 10 ppb for ozone and 50 ppb for NO2 were achieved. Surface topography study of ZnOx films utilizing optical, AFM and SEM analyses has shown a distinct surface morphology variation correlated to the growth technique It is demonstrated that PLD leads to very rough surfaces with characteristic non-coordinated columnar features in contrast with the rather smooth surfaces obtained by sputtering.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 828: Symposium A – Semiconductor Materials for Sensing , 2004 , A1.5
Copyright
Copyright © Materials Research Society 2005

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Granqvist, C. G., Appl. Phys. A 57, 19 (1993).Google Scholar
2. Meixner, H., Gerblinger, J., Lampe, U. and Fleisher, M., Sensors and Actuators B 23, 119 (1995).Google Scholar
3. Gagaoudakis, E., Bender, M., Douloufakis, E., Katsarakis, N., Natsakou, E, Cimalla, V. and Kiriakidis, G., Sensor and Actuators B 80, 155–161 (2001).Google Scholar
4. Kiriakidis, G., Bender, M., Katsarakis, N., Gagaoudakis, E., Hourdakis, E., Douloufakis, E. and Cimalla, V., Phys. Stat. Sol. (a) 185, 27–32 (2001).Google Scholar
5. Gurlo, A., Ivanovskaya, M., Barsan, N., Schweiser-Berberich, M., Weimar, U., Gopel, W. and Dieguez, A., Sensor and Actuators B 44, 327–333 (1997).Google Scholar
6. Takada, T., Suzuki, K. and Nakane, M., Sensors and Actuators B 13, 404 (1993).Google Scholar
7. Vellekoop, M.J., Ultrasonic 36, 7–14 (1998).Google Scholar
8. Ippolito, S.J., Kandasamy, S., Kalantar-zadeh, K., Wlodarski, W., Galatsis, K., Kiriakidis, G., Katsarakis, N. and Katharakis, M., presented at the EUROSENSORS XVII, the 18-th European Conference on Solid-State Transducers, Rome, Italy, 12–15 September, 2004.Google Scholar
9. Xirouchaki, C., Kiriakidis, G., Pedersen, T. F. and Fritzsche, H., J. Appl. Phys. 79, 9349 (1996).Google Scholar
10. Muranaka, S., Bando, Y. and Takada, T., Thin Solid Films 151, 353 (1987).Google Scholar
11. Bender, M., Katsarakis, N., Gagaoudakis, E., Hourdakis, E., Douloufakis, E., Cimalla, V. and Kiriakidis, G.; J. Appl. Phys. 90, 5382 (2001).Google Scholar
12. Das, V.D., Kirupavathy, S., Damodare, L. and Lakshminarayan, N., J. Appl. Phys. 79, 8521 (1996).Google Scholar
13. Suchea, M. and Kiriakidis, G.. “Surface characterization of In and Zn oxides by Atomic Force Microscopy” Int. Semiconductor Conference {CAS 2004} Romania, Oct.4–6, 2004.Google Scholar
14. Kiriakidis, G., Katsarakis, N., Katharakis, M., Suchea, M., Galatsis, K., Wlodarski, W., Kotzias, D., CAS International Conference, Sinaia, Romania, October 4–6, 2004, invited paper.Google Scholar
15. Barsan, Nicolae and Weimar, Udo, Journal of Electroceramics 7, 143 (2001).Google Scholar
16. Katharakis, M., Christoulakis, S., Katsarakis, N., Koudoumas, M., Suchea, M., Savvakis, K., Efthimiopoulos, T., Kiriakidis, G., 20th Panhellenic Conference on Solid State Physics & Materials Science, Ioannina – Greece, September 26–29, 2004, (in Greek).Google Scholar