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Published online by Cambridge University Press: 26 February 2011
A first principles-based multiscale model is developed to examine mechanisms underlying Si nanocrystal formation in Si-rich SiO2. Using the multiscale approach, we have found that the embedded nanocrystal formation is mainly driven by suboxide penalty arising from incomplete O coordination, with a minor contribution of strain, and it is primarily controlled by O diffusion rather than excess Si diffusion and agglomeration. The overall behavior of Si cluster growth from our Monte Carlo simulations based on these fundamental findings agrees well with experiments.