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Multi-Scale Characterization of Pad Role on Material Removal Rate in CMP

Published online by Cambridge University Press:  01 February 2011

Sunil D. Gouda ,
Ashraf Bastawros  and
Abhijit Chandra
Sunil D. Gouda
Affiliation:
Dept. of Mechanical Engineering, Iowa State University, Ames, IA 50011
Ashraf Bastawros
Affiliation:
Dept. of Aerospace Engineering and Mechanics, Iowa State University, Ames, IA 50011
Abhijit Chandra
Affiliation:
Dept. of Mechanical Engineering, Iowa State University, Ames, IA 50011
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Abstract

A combined experimental and theoretical approach has been devised to understand the mechanical behavior of CMP pad. The pad response is examined at different length scale utilizing a nano-indentation with a conical tip and a flat-punch. The experimentally observed trends showed the competition between the local contact field of the abrasive particle and the global porous pad cell deformation. From the experiments, the local particle-level contact, cell bending, long range pad surface asperity contact as well as the bulk response of the pad can be integrated into mechanism-based models for better understanding the applied force partitioning and to predict the characteristics of the material removal rates.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 767: Symposium F – Chemical-Mechanical Planarization , 2003 , F2.5
Copyright
Copyright © Materials Research Society 2003

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