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MOCVD of Aluminum Oxide Barrier Coating

Published online by Cambridge University Press:  11 February 2011

Jun C. Nable ,
Malgorzata A. Gulbinska ,
Steven L. Suib  and
Francis S. Galasso
Jun C. Nable
Affiliation:
Department of Chemistry, University of Connecticut, Storrs, CT 06269
Malgorzata A. Gulbinska
Affiliation:
Department of Chemistry, University of Connecticut, Storrs, CT 06269
Steven L. Suib*
Affiliation:
Department of Chemistry, University of Connecticut, Storrs, CT 06269 Institute of Material Sciences, University of Connecticut, Storrs, CT
Francis S. Galasso
Affiliation:
Department of Chemistry, University of Connecticut, Storrs, CT 06269
*
* corresponding author
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Abstract

High temperature materials such as nickel superalloys require the development of corrosion resistant coatings. These coatings must be thermally stable and chemically inert in order to protect the substrate material. Aluminum oxide is one such candidate. Aluminum acetylacetonate was used as the precursor for metal-organic chemical vapor deposition at atmospheric pressure. Uniform, amorphous, and multi-colored protective coatings were deposited onto nickel substrates at 400 to 500°C and dark gray, and powdery coatings were obtained at higher temperatures of 550 to 600°C. The coating was free from cracks when higher carrier gas flow rate were used.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 750: Symposium Y – Surface Engineering 2002–Synthesis, Characterization and Applications , 2002 , Y5.29
Copyright
Copyright © Materials Research Society 2003

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