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Mid-infrared silicon waveguide resonators with Q∼105 by using photonic crystal cavities

Published online by Cambridge University Press:  13 March 2013

Pao Lin ,
Vivek Singh ,
Yan Cai ,
Neil Sunil Patel ,
Jianwei Mu ,
Lin Zhang ,
Lionel Kimerling  and
Anuradha Murthy Agarwal
Pao Lin
Affiliation:
Microphotonics Center, MIT, Cambridge, Massachusetts, USA.
Vivek Singh
Affiliation:
Microphotonics Center, MIT, Cambridge, Massachusetts, USA.
Yan Cai
Affiliation:
Microphotonics Center, MIT, Cambridge, Massachusetts, USA.
Neil Sunil Patel
Affiliation:
Microphotonics Center, MIT, Cambridge, Massachusetts, USA.
Jianwei Mu
Affiliation:
Microphotonics Center, MIT, Cambridge, Massachusetts, USA.
Lin Zhang
Affiliation:
Microphotonics Center, MIT, Cambridge, Massachusetts, USA.
Lionel Kimerling
Affiliation:
Microphotonics Center, MIT, Cambridge, Massachusetts, USA.
Anuradha Murthy Agarwal
Affiliation:
Microphotonics Center, MIT, Cambridge, Massachusetts, USA.
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Abstract

One dimensional photonic crystal 1D-PhC silicon waveguide resonators with quality factor, Q∼105, are demonstrated at mid-infrared wavelengths between 2 um to 5 um. Silicon has several advantages for mid-infrared applications including its broad mid-infrared transmission spectrum which extends out to 9 um, CMOS compatible fabrication processing, and ease of electronic-photonic integration. The proposed resonators are composed of photonic crystal cavities with optimized (i) lattice parameter a, (ii) cavity width w and (iii) hole radius r. Finite difference time domain (FDTD) simulations are used to adjust these three parameters, a, w, and r, to select a resonant frequency of interest within the mid-infrared spectral range. Due to the high quality factor Q, these PhC silicon waveguide resonators have much higher sensitivity as chemical sensors and have the potential to replace bulky instruments such as an FTIR.

Keywords

Siopticaldevices
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1510: Symposium DD – Group IV Semiconductor Nanostructures and Applications , 2013 , mrsf12-1510-dd05-30
Copyright
Copyright © Materials Research Society 2013

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References

REFERENCES

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