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Microwave Plasma Assisted CVD of Diamond on Titanium and Ti-6Al-4V

Published online by Cambridge University Press:  10 February 2011

D. A. Tucker ,
M. T. McClure ,
Z. Fathi ,
Z. Sitar ,
B. Walden ,
W. H. Sutton ,
W. A. Lewis  and
J. B. Wei
D. A. Tucker
Affiliation:
Lambda Technologies, Inc., 8600 Jersey Ct., Suite C, Raleigh, NC 27613
M. T. McClure
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Campus Box 7919, Raleigh, NC 27695-7919
Z. Fathi
Affiliation:
Lambda Technologies, Inc., 8600 Jersey Ct., Suite C, Raleigh, NC 27613
Z. Sitar
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Campus Box 7919, Raleigh, NC 27695-7919
B. Walden
Affiliation:
Department of Physics, Trinity College, 300 Summit St., Hartford, CT 06106
W. H. Sutton
Affiliation:
United Technologies Research Center, 411 Silver Lane-MS-24, East Hartford, CT 06108
W. A. Lewis
Affiliation:
Lambda Technologies, Inc., 8600 Jersey Ct., Suite C, Raleigh, NC 27613
J. B. Wei
Affiliation:
Lambda Technologies, Inc., 8600 Jersey Ct., Suite C, Raleigh, NC 27613
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Abstract

The ultimate goal of this research was to demonstrate a Microwave Plasma assisted Chemical Vapor Deposition (MPCVD) process to coat a Ti-6A1-4V bearing shaft. Preliminary experiments were performed in an ASTeX™ system on flat chemically pure titanium and Ti-6AI-4V coupons. Diamond deposition was also attempted on a Ti-6AI-4V wedge sample which contained a curved surface that simulated the bearing. Although uniform diamond deposition was attained on the flat samples, very poor uniformity was observed on the curved sample. This lack of uniformity was attributed to the difficulty in controlling the plasma-to-substrate distance in a single mode, single frequency reactor and it was believed that by varying the frequency and using a multimode cavity one could solve this problem. Thus, depositions on a titanium rod were performed in a variable frequency MPCVD reactor. It was determined visually that the variable frequency operation provided uniform plasma distribution along the length and circumference of the rod and resulted in a fairly uniform coating. However, scanning electron microscopy revealed that the morphology of the particles was poor and micro-Raman spectroscopy showed weak, broad peaks that were attributable to amorphous carbon. It is believed that by fine-tuning parameters, a uniform diamond film of good quality can be achieved along the entire rod.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 430: Symposium O – Microwave Processing of Materials V , 1996 , 635
Copyright
Copyright © Materials Research Society 1996

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