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Microreactors for Thin-Film Calorimetry

Published online by Cambridge University Press:  11 February 2011

J. Rodríguez-Viejo ,
M. Chacón ,
A.F. Lopeandía ,
M.T. Clavaguera-Mora ,
Leonel R. Arana  and
K.F. Jensen
J. Rodríguez-Viejo
Affiliation:
Grupo de Física de Materiales I. Dep. Física, Universidad Autónoma de Barcelona, 08193 Bellaterra, Spain.
M. Chacón
Affiliation:
Grupo de Física de Materiales I. Dep. Física, Universidad Autónoma de Barcelona, 08193 Bellaterra, Spain.
A.F. Lopeandía
Affiliation:
Grupo de Física de Materiales I. Dep. Física, Universidad Autónoma de Barcelona, 08193 Bellaterra, Spain.
M.T. Clavaguera-Mora
Affiliation:
Grupo de Física de Materiales I. Dep. Física, Universidad Autónoma de Barcelona, 08193 Bellaterra, Spain.
Leonel R. Arana
Affiliation:
Grupo de Física de Materiales I. Dep. Física, Universidad Autónoma de Barcelona, 08193 Bellaterra, Spain.
K.F. Jensen
Affiliation:
Grupo de Física de Materiales I. Dep. Física, Universidad Autónoma de Barcelona, 08193 Bellaterra, Spain.
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Abstract

We have designed and developed a calorimeter that is capable of measuring the heat released by ultrathin films in the temperature range from 77 to 1050 K. Semiconductor processing techniques are used to fabricate the microreactors. The symmetric design of the Pt heaters in the microreactor channel provide a good temperature profile across the active region of the membrane making it suitable for accurate calorimetric measurements. The low thermal mass of our system allows for a high sensitivity. The effective heat capacity of the microcalorimeters with a 200 nm SixNy membrane is 0.14 μJ/K at room temperature. In high vacuum heating rates of 2×106 K/s have been achieved. Under these conditions the microcalorimeter works as an adiabatic scanning calorimeter and therefore heat capacity is directly obtained from the input power. A thermal characterization of the microcalorimeters in the transient state and calorimetric measurements on indium thin films and films made of CdSe nanocrystals are briefly discussed to show the potentiality of the microreactors.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 741: Symposium J – Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines , 2002 , J2.4
Copyright
Copyright © Materials Research Society 2003

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References

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