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Micro-Channel Plate Detectors Based on Hydrogenated Amorphous Silicon

Published online by Cambridge University Press:  01 February 2011

Nicolas Wyrsch ,
François Powolny ,
Matthieu Despeisse ,
Sylvain Dunand ,
Pierre Jarron  and
Christophe Ballif
Nicolas Wyrsch
Affiliation:
[email protected], EPFL, IMT, Neuchâtel, Switzerland
François Powolny
Affiliation:
[email protected], CERN, Genève, Switzerland
Matthieu Despeisse
Affiliation:
[email protected], EPFL, IMT, Neuchâtel, Switzerland
Sylvain Dunand
Affiliation:
[email protected], EPFL, IMT, Neuchâtel, Switzerland
Pierre Jarron
Affiliation:
[email protected], CERN, Genève, Switzerland
Christophe Ballif
Affiliation:
[email protected], EPFL, IMT, Neuchâtel, Switzerland
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Abstract

A new type of micro-channel plate detector based on hydrogenated amorphous silicon is proposed which overcomes the fabrication and performance issues of glass or bulk silicon ones. This new type of detectors consists in 80-100 μm thick layers of amorphous silicon which are micro-machined by deep reactive ion etching to form the channels. This paper focuses on the structure and fabrication process and presents first results obtained with test devices on electron detection which demonstrate amplification effects. Fabrication and performance issues are also discussed.

Keywords

amorphousSisensor
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1245: Symposium A – Amorphous and Polycrystalline Thin-Film Silicon Science and Technology-2010 , 2010 , 1245-A08-04
Copyright
Copyright © Materials Research Society 2010

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References

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