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Micro Tensile Tests on Aluminium Thin Films: Tensile Device and In Situ Observations

Published online by Cambridge University Press:  01 February 2011

Michel T. Ignat ,
Sabine Lay ,
Francine Roussel d'Herbey ,
Cedric Seguineau ,
Christophe Malhaire ,
Xavier Lafontan ,
Jean Michel Desmarres  and
Sebastiano Brida
Michel T. Ignat
Affiliation:
[email protected], CNRS, Grenoble-INP, Saint Martin d'Hères, France
Sabine Lay
Affiliation:
[email protected], CNRS, Grenoble-INP, Saint Martin d'Hères, France
Francine Roussel d'Herbey
Affiliation:
[email protected], CNRS, Grenoble-INP, Saint Martin d'Hères, France
Cedric Seguineau
Affiliation:
[email protected], Novamems, CNES, Toulouse, France
Christophe Malhaire
Affiliation:
[email protected], INSA-Lyon, INL, Lyon, France
Xavier Lafontan
Affiliation:
[email protected], Novamems, Toulouse, France
Jean Michel Desmarres
Affiliation:
[email protected], CNES, Toulouse, France
Sebastiano Brida
Affiliation:
[email protected], Auxitrol, Bourges, France
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Abstract

The results of micromechanical tensile experiments performed on thin aluminum samples are presented and discussed. The micro tensile test system and the design of the samples, based on finite element modeling (FEM), and their production by micromachining are briefly described. Some examples of the stress strain curves are presented. The Young's modulus and critical parameters (flow and rupture stress and strains) are reported. The micro structural changes induced by the tensile experiment were observed during and after the testing by scanning electron microscopy (SEM) and transmission electron microscopy (TEM).The results of micromechanical tensile experiments performed on thin aluminum samples are presented and discussed. The micro tensile test system and the design of the samples, based on finite element modeling (FEM), and their production by micromachining are briefly described. Some examples of the stress strain curves are presented. The Young's modulus and critical parameters (flow and rupture stress and strains) are reported. The micro structural changes induced by the tensile experiment were observed during and after the testing by scanning electron microscopy (SEM) and transmission electron microscopy (TEM).

Keywords

microelectro-mechanical (MEMS)ductilityelastic properties
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1139: Symposium GG – Microelectromechanical Systems–Materials and Devices II , 2008 , 1139-GG04-04
Copyright
Copyright © Materials Research Society 2009

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References

REFERENCES

1. Schweitz, J.A., MRS Bulletin 17 (7), 34, (1992)Google Scholar
2. Sharpe, W.N., Mater.Res.Soc.Symp.Proc. Vol.1052 (2008)Google Scholar
3. Reliability of MEMS, Advanced Micro and Nanosystems, O. Tabata and T. Tsuchiya Editors, Wiley Verlag GmbH, Vol 6 (2008)Google Scholar
4. Ignat, M., “Stresses and mechanical stability of CVD thin films” Chapter 3 in Surface Engineering Series Ed. J.H. Park. ASM International Series Vol 2, (2001) pp 45–80 Google Scholar
5. Ignat, M..Key Eng. Mat., Vol.116–117,. 290 (1996)Google Scholar
6. Ignat, M., Marieb, T., Fujimoto, H., Flinn, P.A., Thin Solid Films 353,.201 (1999)Google Scholar
7. Malhaire, C., Ignat, M., Dogeche, K., Brida, S., Josserond, C. and Debove, L.. Proceedings of Transducers'07 and Eurosensors XXI, Symp. 2. Vol.1, 623, (2007)Google Scholar
8. Malhaire, C., Seguineau, C., Ignat, M., Josserond, C., Debove, L., Brida, S., Desmarres, J.M., Lafontan, X., Review of Scientific Instruments (2009)(in press)Google Scholar
9. Asby, M.F.. Material Selector Granta Design. Cambridge University.(2005)Google Scholar
10. Cornella, G. “Monotonic and cyclic testing of film materials for MEMS applications” PhD, Stanford University (1999).Google Scholar
11. Read, D., Cheng, Y., Keller, R. and McColskey, JD, Scripta Materialia 45, 583 (2001)Google Scholar
12. Haque, M.A., Saif, M.T., Scripta Materialia, 47, 863 (2002)Google Scholar
13. Gianola, D.S., Van Petegem, S., Legros, M., Brandstetter, S., Swygenhoven, H., Hemker, KJ, Acta Materialia 54,.2253 (2006)Google Scholar
14. Choski, A.H., Rosen, A., Karch, J., Gleiter, H., Scripta Materialia, 23, 1679 (1989).Google Scholar
15. Fougere, G.E., Weertman, J.R., Siegel, R.W., Kim, S., Scripta Materialia, 26, 1879 (1992)Google Scholar