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Mechanical Property Measurement of Electroplated Gold Microstructure Using Resonance Method

Published online by Cambridge University Press:  10 February 2011

Chang-Wook Baek ,
Yong-Kweon Kim  and
Yoo-Min Ahn
Chang-Wook Baek
Affiliation:
School of Electrical Engineering, Seoul National University, Korea
Yong-Kweon Kim
Affiliation:
School of Electrical Engineering, Seoul National University, Korea
Yoo-Min Ahn
Affiliation:
Department of Mechanical Engineering, Hanyang University, Korea E-mail: [email protected]
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Abstract

Mechanical properties of electroplated gold microstructures were determined by measuring resonance frequencies of microbeams. Cantilever and bridge beam structures of different lengths were fabricated by electroplating surface micromachining technique, specially designed to realize an ideal fixed-boundary anchor. Fabricated beams were electrostatically excited and their resonance frequencies were measured by optical system composed of laser displacement meter with dynamic signal analyzer. Young's modulus, residual stress were calculated from the measured frequency data.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 605: Symposium MM – Materials Science of Microelectromechanical Systems Devices II , 1999 , 229
Copyright
Copyright © Materials Research Society 2000

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