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Mechanical Properties and Morphology of Pulsed – Laser Deposited BaTiO3 Thin Films

Published online by Cambridge University Press:  15 February 2011

Jie Xu ,
Daniel P. Durisin  and
Gregory W. Auner
Jie Xu
Affiliation:
Dept. of Electrical and Computer Engineering, Wayne State University, Detroit, MI 48202, U.S.A.
Daniel P. Durisin
Affiliation:
Dept. of Electrical and Computer Engineering, Wayne State University, Detroit, MI 48202, U.S.A.
Gregory W. Auner
Affiliation:
Dept. of Electrical and Computer Engineering, Wayne State University, Detroit, MI 48202, U.S.A.
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Abstract

BaTiO3 thin films have been grown on Si(100) substrate by KrF pulsed – laser deposition (PLD). The process parameters such as background gas pressure, substrate temperature, and laser fluence were varied in order to investigate their influence on the crystal structure, surface morphology and mechanical properties. The films were characterized by X-ray diffraction (XRD), UV/VIS/NIR spectrometer, atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS). The hardness, Young's modules and scratch testing of BaTiO3 films were measured using nano-indenter. The stoichiometric BaTiO3 films having uniform grains were grown. The defects and particulates were generated at higher laser fluence. The size and density of particulates were increased with tighter laser focus. The results from dynamic scratch test indicated that the films with good adhesion were grown at moderate laser fluence.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 780: Symposium Y – Advanced Optical Processing of Materials , 2003 , Y3.5
Copyright
Copyright © Materials Research Society 2003

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References

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