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Mechanical Characterization of Atomic Layer Deposited (ALD) Alumina for Applications in Corrosive Environments

Published online by Cambridge University Press:  31 January 2011

Kuang-Shun Ou ,
I-Kuan Lin ,
Ping-Hsin Wu ,
Zhi-Kai Huang ,
Kuo-Shen Chen  and
Xin Zhang
Kuang-Shun Ou
Affiliation:
[email protected], National Cheng-Kung University, Department of Mechanical Engineering, Tainan, Taiwan, Province of China
I-Kuan Lin
Affiliation:
[email protected], Boston University, 10 Cummington Street, Boston, Massachusetts, 02215, United States
Ping-Hsin Wu
Affiliation:
[email protected], National Cheng Kung University, Mechanical Engineering, Tainan, Taiwan, Province of China
Zhi-Kai Huang
Affiliation:
[email protected], National Cheng-Kung University, Department of Mechanical Engineering, Tainan, Taiwan, Province of China
Kuo-Shen Chen
Affiliation:
[email protected], National Cheng-Kung University, Department of Mechanical Engineering, Tainan, Taiwan, Province of China
Xin Zhang
Affiliation:
[email protected], Boston University, Mechanical Engineering, Boston, Massachusetts, United States
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Abstract

In this work, thin ALD alumina films were fabricated for evaluating their capabilities as a barrier material for corrosive environments. The fracture toughness and the corrosion-resisting properties after fatigue cycle of these thin ALD alumina films have been characterized. Indentation tests indicate that the ALD alumina/Al structures could enhance both the yield strength of the metal and the effective fracture toughness of the coated ALD alumina films and this result could be useful for designing nanocomposite structures. However, the test results also indicate that the interfacial strength of the ALD/Al structures was prone to degrade under fatigue loading under corrosive environment. This could potentially be a problem for the long term reliability of related devices operated under a harsh environment. In addition, the strong correlation between indentation behavior and fatigue loading for the structure indicate that nanoindentation response could be possibly used to indicate the damage level of microstructures for future reliability evaluations.

Keywords

fatiguefracturetoughness
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1222: Symposium DD – Microelectromechanical Systems — Materials and Devices III , 2009 , 1222-DD02-14
Copyright
Copyright © Materials Research Society 2010

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