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Massively Parallel Scanning Probes Microscope with Digital Holographic Readout

Published online by Cambridge University Press:  01 February 2011

Laurent Sache  and
Hannes Bleuler
Laurent Sache
Affiliation:
[email protected], EPFL, LSRO, EPFL - LSRO1, Station 9, Lausanne, 1015, Switzerland
Hannes Bleuler
Affiliation:
[email protected], EPFL - LSRO, Lausanne, 1015, Switzerland
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Abstract

Massively Parallel Scanning Probe Microscopy is an obvious path for enhancing the acquisition speed and the imaging range of current based-AFM metrology devices. Current experimental systems, based on active probes array, would reach their limits in density and hardware complexity. This paper presents a new approach with the promise to break several of these barriers. The key idea is readout of a Scanning Probes Microscope (SPM) array by an interferometer technique called digital holography which directly gives the cantilever phase information at each pixel of a CCD array. This means that no contact line to each individual SPM probes is needed, allowing us to reach very high density of probes. The phase information is available in a parallel form in real-time. Moreover, the digital holography optical setup (Digital Holography Microscope or DHM) needs in principle no expensive components, optical (or, to a large extent, mechanical) imperfections being compensated in the signal processing, i.e. in electronics. This gives the system the potential for a low cost device with fast and large readout capability.

Keywords

microstructureholographymicroelectro-mechanical (MEMS)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 961: Symposium O – Nanostructured and Patterned Materials for Information Storage , 2006 , 0961-O20-03
Copyright
Copyright © Materials Research Society 2007

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References

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