Hostname: page-component-78c5997874-dh8gc Total loading time: 0 Render date: 2024-11-07T22:23:59.991Z Has data issue: false hasContentIssue false

Low Temperature Ripple Formation: Ion-Induced Effective Surface Diffusion in Ion Sputtering

Published online by Cambridge University Press:  15 February 2011

M. A. Makeev
Affiliation:
Department of Physics, University of Notre Dame, Notre Dame, IN 46656
A.-L. Barabási
Affiliation:
Department of Physics, University of Notre Dame, Notre Dame, IN 46656
Get access

Abstract

Surfaces bombarded with energetic ions may develop a rough or a ripple surface morphology. The ripple formation has been successfully described by the instability caused by preferential erosion, the ripple wavelength being determined by the competition between surface erosion and thermally activated diffusion. However, as recent experiments and computer simulations have shown, ripple formation takes place even at the low temperatures, when thermally activated processes are suppressed. In this paper we propose a theory to explain low-temperature ripple formation based on the ion-induced effective surface diffusion.

Type
Research Article
Copyright
Copyright © Materials Research Society 1999

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

[1] Chason, E., Mayer, T. M., Kellerman, B. K., Mcllroy, D. N., Howard, A. J., Phys. Rev. Lett. 72, 3040 (1994); T. M. Mayer, E. Chason and A. J. Howard, J. Appl. Phys. 76, 1633 (1994); G. Carter, B. Navinšek and J. L. Whitton in Vol. II of Sputtering by Particle Bombardment, R. Behrisch, ed. (Springer-Verlag, Heidelberg 1981, 1983), p. 231.Google Scholar
[2] Mayer, T. M., Chason, E. and Howard, A. J., J. Appl. Phys. 76, 1633 (1994).Google Scholar
[3] Wittmaack, K., J. Vac. Sci. Thechnol. A 8(3), 2246 (1990).Google Scholar
[4] Vajo, J. J., Doty, R. E. and Cirlin, E.-H., J. Vac. Sci. Technol. A 14(5), 2709 (1996).Google Scholar
[5] Vasiliu, F., Teodorescu, I. A., Glodeanu, F., J. Mater. Sci. 10, 399 (1975).Google Scholar
[6] MacLaren, S.W., Baker, J.E., Finnegan, N.L., and Loxton, C.M., J. Vac. Sci. Technol. A 10, 468 (1992).Google Scholar
[7] Cuerno, R. and Barabdsi, A.-L., Phys. Rev. Lett. 74, 4746 (1995).Google Scholar
[8] Koponen, I., Hautala, M., and Sievanen, O.-P., Phys. Rev. Lett. 78, 2612 (1997).Google Scholar
[9] Makeev, M. A., Barabasi, A.-L., Appl. Phys. Lett. 71, 2800 (1997).Google Scholar
[10] Dynamics of Fractal Surfaces, Family, F. and Vicsek, T., eds. (World Scientific, Singapore, 1991); W.M. Tong, and R.S. Williams, Annu. Rev. Phys. Chem. 45, 405 (1994); A.-L. Barabási and H. E. Stanley, Fractal Concepts in Surface Growth (Cambridge University Press, Cambridge, 1995).Google Scholar
[11] Eklund, E. A., Bruinsma, R., and Rudnick, J., Phys. Rev. Lett. 67, 1759 (1991); Surf. Sci. 285, 157 (1993); J. Krim, I. Heyvaert, C. Van Haesendonck, and Y. Bruynseraede, Phys. Rev. Lett. 70, 57 (1993); H.-N. Yang, G.-C. Wang, and T.-M. Lu, Phys. Rev. B 50, 7635 (1994); E. A. Eklund, E. J. Snider, R.S. Williams, Surf. Sci. 285, 157 (1987); E. A. Eklund el al. Phys. Rev. Lett. 67, 1759 (1991).Google Scholar
[12] Sigmund, P., Phys. Rev. 184, 383 (1969); J. Mat. Sci. 8, 1545 (1973).Google Scholar
[13] Bradley, R. M. and Harper, J. M. E., J. Vac. Sci. Technol. A6, 2390 (1988).Google Scholar
[14] Cavaille, J.Y. and Drechsler, M., Surf. Sci. 75., 342 (1978).Google Scholar
[15] Rossnagel, S.M., Robinson, R.S., and Kaufman, H.R., Surf. Sci. 123, 89 (1982).Google Scholar
[16] Kuramoto, Y. and Tsuzuki, T., Prog. Theor. Phys. 55, 356 (1977); G. I. Sivashinsky, Acta Astronaut. 6, 569 (1979).Google Scholar
[17] Rost, M., and Krug, J., Phys. Rev. Lett. 75, 3894 (1995).Google Scholar
[18] Barabasi, A.-L., Makeev, M., Lee, C.-S. and Cuerno, R., in Dynamics of Fluctuating Interfaces and Related Phenomena, 4th CTP Workshop on Statistical Physics, Seoul, Korea, Kim, D., Park, H., and Kahng, B. eds. (World Scientific, Singapore, 1997).Google Scholar
[19] Makeev, M. A., Cuerno, R., Barabasi, A.-L. (to be published).Google Scholar