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Laser-Crystallized High Quality ITO on Plastic Substrates for Flexible Displays

Published online by Cambridge University Press:  15 February 2011

Wonsuk Chung ,
Paul Wickboldt ,
Daniel Toet ,
Paul G. Carey  and
Michael O. Thompson
Wonsuk Chung
Affiliation:
FlexICs, Inc., 165 Topaz Street, Milpitas, CA 95035
Paul Wickboldt
Affiliation:
FlexICs, Inc., 165 Topaz Street, Milpitas, CA 95035
Daniel Toet
Affiliation:
FlexICs, Inc., 165 Topaz Street, Milpitas, CA 95035
Paul G. Carey
Affiliation:
FlexICs, Inc., 165 Topaz Street, Milpitas, CA 95035
Michael O. Thompson
Affiliation:
Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14853
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Abstract

In the study presented here, we successfully demonstrated that high quality ITO films could be obtained on plastic substrates using Excimer laser crystallization. ITO films were first deposited at 10 °C on PEN substrates by DC magnetron sputtering, and then irradiated using a homogenized pulsed XeCl excimer laser beam (308 nm, 35 ns pulse duration) in a vacuum chamber. It was possible to reliably attain Type I ITO films with sheet resistances down to 35 Ω/΢, combined with 80 % optical transmittance in visible range. Well defined 2 μm lines could be obtained using simple HCl etchant at room temperature. We also developed Type II ITO films with a sheet resistance of 15 Ω/΢ and an optical transmittance of 80 % by means of laser annealing on plastic substrates, although these materials were found inferior to Type I in etching properties.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 769: Symposium H – Flexible Electronics - Materials and Device Technology , 2003 , H10.1
Copyright
Copyright © Materials Research Society 2003

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References

1. Lewis, B. G. and Paine, D. C., MRS bulletin, 22 (August 2000)Google Scholar
2. Chopra, K. L., Major, S., and Panday, D. K., Thin Solid films 102, 1 (1983)Google Scholar
3. Cairns, D. R., Witte, R. P. II, Sparacin, D. K., Sachsman, S. M., Paine, D. C., Crawford, G. P., and Newton, R. R., Appl. Phys. Lett. 76 (11), 1425 (2000)Google Scholar
4. Minami, T., Sonohara, H., Kakumu, T., and Takata, S., Thin Solid Films 270, 37 (1995)Google Scholar
5. Chung, W., Thompson, M. O., Wickboldt, P., Toet, D., and Carey, P. G. SID 02 Digest, 6.4 (2002)Google Scholar
6. Chung, W., PhD. Thesis, Cornell University, 2002 Google Scholar
7. Hoheisel, M., Mitwalsky, A., and Mrotzek, C. Phys. Stat. Sol. (a) 123, 461 (1991)Google Scholar