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Large Area 2-Dimensional a-Si:H Imaging Arrays

Published online by Cambridge University Press:  21 February 2011

R. A. Street ,
I. Fujieda ,
R. Weisfield ,
S. Nelson  and
P. Nylen
R. A. Street
Affiliation:
Xerox Palo Alto Research Center, Palo Alto, CA 94304
I. Fujieda
Affiliation:
Xerox Palo Alto Research Center, Palo Alto, CA 94304
R. Weisfield
Affiliation:
Xerox Palo Alto Research Center, Palo Alto, CA 94304
S. Nelson
Affiliation:
Xerox Palo Alto Research Center, Palo Alto, CA 94304
P. Nylen
Affiliation:
University of Stockholm, Sweden
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Abstract

Six inch diagonal, two-dimensional amorphous silicon imaging arrays with 256×240 pixels of 450 micron pitch have been fabricated. Examples of images made under visible light and X-rays illustrate applications to electronic document input and medical imaging. The limits to the array performance are explored through studies of image lag due to deep trapping at dangling bond defects in the a-Si:H sensor, and through measurements of electronic noise.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 258: Symposium A – Amorphous Silicon Technology – 1992 , 1992 , 1145
Copyright
Copyright © Materials Research Society 1992

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References

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