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Jet Vapor Deposition of Lead Zirconate Titanate (PZT) for Thin Film Pyroelectric Detectors

Published online by Cambridge University Press:  22 February 2011

John Golz ,
Y. D. Di ,
B. Halpern ,
J. J. Schmitt ,
Phil Cirino  and
A. Bartlett
John Golz
Affiliation:
Jet Process Corporation, New Haven, CT
Y. D. Di
Affiliation:
Jet Process Corporation, New Haven, CT
B. Halpern
Affiliation:
Jet Process Corporation, New Haven, CT
J. J. Schmitt
Affiliation:
Jet Process Corporation, New Haven, CT
Phil Cirino
Affiliation:
EDO Corporation/Barnes Engineering, Shelton, CT
A. Bartlett
Affiliation:
EDO Corporation/Barnes Engineering, Shelton, CT
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Abstract

Thin films of pyroelectric PZT deposited by Jet Vapor Deposition are considered here for application in IR detector arrays. PZT films of 0.5 μm thickness were deposited on platinum coated insulating substrates and then annealed to increase the perovskite grain size. Capacitor test structures were used to measure the dielectric constant, loss, AC resistivity, and pyroelectric coefficient. We compare the results with known values for bulk PZT and discuss their relevance to detector design and performance.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 284: Symposium G – Amorphous Insulating Thin Films , 1992 , 541
Copyright
Copyright © Materials Research Society 1993

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References

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