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Ion-beam Texturing at Nucleation – Manipulation of Crystallographic Orientation in Cubic Materials at the Nanometer Scale

Published online by Cambridge University Press:  31 January 2011

James Groves ,
Robert Hammond ,
Ann Marshall ,
Raymond F DePaula ,
Liliana Stan  and
Bruce M Clemens
James Groves
Affiliation:
[email protected], Stanford University, Materials Science and Engineering, 94305, California, United States
Robert Hammond
Affiliation:
[email protected], Stanford University, GLAM, Stanford, California, United States
Ann Marshall
Affiliation:
[email protected], Stanford University, GLAM, Stanford, California, United States
Raymond F DePaula
Affiliation:
[email protected], Los Alamos National Laboratory, Superconductivity Technology Center, 87545, New Mexico, United States
Liliana Stan
Affiliation:
[email protected], Los Alamos National Laboratory, Superconductivity Technology Center, 87545, New Mexico, United States
Bruce M Clemens
Affiliation:
[email protected], Stanford University, Materials Science and Engineering, 94305, California, United States
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Abstract

The use of an ion beam assist during the concurrent deposition of cubic materials can result in the growth of crystallographically oriented thin films. A model system, magnesium oxide (MgO), has been successfully used as a biaxially textured template film and develops texture in a different manner from that of other well-studied materials, like yttria-stablized zirconia. Here, we present data on the initial nucleation of biaxial texture in this model system using a novel in-situ quartz crystal microbalance (QCM) substrate combined with in-situ reflected high-energy electron diffraction (RHEED). Temporal correlation of mass uptake with the RHEED images of the growing surface can be used to elucidate the mechanism of texture development in these films. Experimental data shows that the initially polycrystalline MgO film develops biaxial crystallographic texture at a thickness of ˜2 nm, regardless of the ion-to-molecule ratio. RHEED images show the onset of texture occurs quickly and is somewhat analogous to a solid phase re-crystallization process with crystallite sizes of ˜3 to 4 nm. Imaging with transmission electron microscopy has corroborated these observations. Changes in the ion-to-molecule ratio can influence the crystallite size and affect the nucleation density of these films. Growth of these films on various substrates changes the sticking coefficient of the MgO and influences the nucleation density and film growth mode as well. This opens the possibility of using MgO and other materials to develop biaxially textured crystallites with a narrow, specified size distribution for nanoscale applications.

Keywords

ion-beam assisted depositiontextureRHEED
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1181: Symposium DD – Ion Beams and Nano-Engineering , 2009 , 1181-DD04-03
Copyright
Copyright © Materials Research Society 2009

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