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Influence of Gas Atmosphere on the Plasticity of Metal Thin Films

Published online by Cambridge University Press:  01 February 2011

T. Wübben ,
G. Dehm  and
E. Arzt
T. Wübben
Affiliation:
Max-Planck Institute for Metals Research, Stuttgart, Germany
G. Dehm
Affiliation:
now at Erich Schmid Institut für Materialwissenschaft, Österreichische Akademie der Wissenschaften, and Department für Materialphysik, Montanuniversität Leoben, Leoben, Austria
E. Arzt
Affiliation:
Max-Planck Institute for Metals Research, Stuttgart, Germany Institut für Metallkunde, University of Stuttgart, Stuttgart, Germany
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Abstract

Stresses in thin films are routinely measured by the so-called substrate curvature technique. These experiments are usually carried out in air or under a protective gas atmosphere. In this contribution we describe a new set-up capable of performing substrate curvature measurements under ultra-high vacuum conditions. The advantages are the absence of possible artifacts due to gas/film interactions, better control of gas composition, and the possibility to measure chemical effects on mechanical properties in a controlled way. We present first results that indicate an unexpected sensitivity even of polycrystalline Cu films to the gas environment.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 875: Symposium O – Thin Films - Stresses and Mechanical Properties XI , 2005 , O6.5
Copyright
Copyright © Materials Research Society 2005

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