Published online by Cambridge University Press: 31 January 2011
A series of simulated microstructures containing nanometer-scale precipitates was created with an atom probe simulator. These data were then analyzed with the proximity histogram and the maximum separation method to determine the influence of the particular analysis method. For simulated 2-nm-radius spherical precipitates, the optimized voxel size and delocalization were found to be 0.5-0.6 nm and 1.0-1.5 nm, respectively. Under optimum analysis parameters, the voxelization/delocalization process only slightly degrades the interface width determined from the proximity histogram to ˜0.15±0.04 nm.