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Hybrid Polymer/Ultrathin Porous Nanocrystalline Silicon Membranes System for Flow-through Chemical Vapor and Gas Detection

Published online by Cambridge University Press:  31 January 2011

Maryna Kavalenka ,
David Fang ,
Christopher C Striemer ,
James L McGrath  and
Philippe M Fauchet
Maryna Kavalenka
Affiliation:
[email protected], University of Rochester, Electrical and Computer Engineering, Rochester, New York, United States
David Fang
Affiliation:
[email protected], University of Rochester, Electrical and Computer Engineering, Rochester, New York, United States
Christopher C Striemer
Affiliation:
[email protected], University of Rochester, Electrical and Computer Engineering, Rochester, New York, United States
James L McGrath
Affiliation:
[email protected], University of Rochester, Biomedical Engineering, Rochester, New York, United States
Philippe M Fauchet
Affiliation:
[email protected], University of Rochester, Electrical and Computer Engineering, Rochester, New York, United States
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Abstract

Here we discuss a novel capacitive-type chemical sensor structure that uses recently discovered porous nanocrystalline silicon (pnc-Si) membranes [1] covered with metal as the capacitor plates while a polymer layer sandwiched between them serves as the sensing layer for solvent vapor detection. Pnc-Si is new ultrathin (15 nm) membrane material with pore sizes ranging from 5 to 50 nm and porosities from < 0.1 to 15 % that is fabricated using standard silicon semiconductor processing techniques. We present a study of pnc-Si membranes as a platform for such a sensor. The degree of swelling and the reversibility of the polymer/pnc-Si membrane system immersed in analyte-containing vapors are observed using optical and electrical techniques.

Keywords

sensornanostructureelectrical properties
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1190: Symposium NN – Active Polymers , 2009 , 1190-NN12-03
Copyright
Copyright © Materials Research Society 2009

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References

1 Striemer, C. C., Gaborski, T. R., McGrath, J. L. & Fauchet, P. M. Nature 445, 749–753 (2007)10.1038/nature05532Google Scholar
2 Li, J.R., Xu, J.R., Zhang, M.Z. et al. Carbon 41, 2353(2003)10.1016/S0008-6223(03)00273-2Google Scholar
3 Patel, S. V., Mlsna, T. E. et al. Sens. Actuators B 96, 541–553 (2003)10.1016/S0925-4005(03)00637-3Google Scholar
4 Kitsara, M., Goustouridis, S. et al. Sens. Actuators B 127, 186–192 (2007)10.1016/j.snb.2007.07.021Google Scholar
5 Kummer, A.M., Hierlemann, A., Baltes, H. Analytical Chemistry 76, 2470–2477 (2004)10.1021/ac0352272Google Scholar
6 Hierlemann, A. et al. Sens. Actuators B 70, 2(2000)10.1016/S0925-4005(00)00546-3Google Scholar
7 McGill, R. A. et al. Sens. Actuators B 65, 10(2000)10.1016/S0925-4005(99)00352-4Google Scholar
8 Grate, J. W., Wise, B. M., Abraham, M. H. Analytical Chemistry 71, 4544(1999)10.1021/ac990336vGoogle Scholar
9 Patel, S.V. et al. Int. J. of P. and An. Chem. 76, 872–877 (2008)Google Scholar
10 Lee, J.N., Park, C., Whitesides, G. M. Analytical Chemistry 75, 6544–6554 (2003)10.1021/ac0346712Google Scholar