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HgTe-CdTe Superlattices Grown by Photo-MOCVD

Published online by Cambridge University Press:  25 February 2011

William L. Ahlgren ,
J. B. James ,
R. P. Ruth ,
E. A. Patten  and
J.-L. Staudenmann
William L. Ahlgren
Affiliation:
Santa Barbara Research Center, 75 Coromar Drive, Goleta, CA 93117
J. B. James
Affiliation:
Santa Barbara Research Center, 75 Coromar Drive, Goleta, CA 93117
R. P. Ruth
Affiliation:
Santa Barbara Research Center, 75 Coromar Drive, Goleta, CA 93117
E. A. Patten
Affiliation:
Santa Barbara Research Center, 75 Coromar Drive, Goleta, CA 93117
J.-L. Staudenmann
Affiliation:
Ames Laboratory and Department of Physics, Iowa State University, Ames, IA 50011
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Abstract

HgTe-CdTe superlattices have been grown, for the first time, by photoassisted MOCVD. The substrate temperature was 182°C. Superlattices were obtained despite low growth rates requiring long growth times (∼10 hours). Interdiffusion during growth may be slowed down by growing under saturated Hg vapor to minimize cation-vacancy formation. The nominal superlattice structures were 70Å HgTe-30Å CdTe, 40Å HgTe-40Å CdTe, and similar. Actual superlattice structures were verified by cross-sectional TEM and diffractometer x-ray diffraction patterns. The x-ray diffraction patterns showed satellite peaks up to third order. The actual structures had HgTe layers ∼20% thicker than the nominal (target) values. A grid-like array of dislocations at the substrate-epilayer interface, suggesting operation of a dislocation-blocking mechanism, was observed. Deficiencies in the superlattice growths include a low growth rate, nonuniform layers, high dislocation density (∼108 cm−2 in best layers), and high n-type carrier concentration (∼1018 cm−3 with mobilities up to 3.5 × 104 cm2 V−1 s−1 in the best layer) which may reflect the presence of donor impurities in the material.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 90: Symposium R – Materials for Infrared Detectors and Sources , 1986 , 405
Copyright
Copyright © Materials Research Society 1987

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References

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