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Helically Perforated Thin Films -- Dependence of Mechanical Properties on Microstructure

Published online by Cambridge University Press:  26 February 2011

Sumudu P. Fernando ,
Anastasia L. Elias  and
Michael J. Brett
Sumudu P. Fernando
Affiliation:
[email protected], University of Alberta, Electrical and Computer Engineering, University of Alberta, ECERF, 9107 - 116 St., Edmonton AB, Edmonton, T6J1P3, Canada
Anastasia L. Elias
Affiliation:
[email protected], University of Alberta, Electrical and Computer Engineering, University of Alberta, ECERF, 9107 - 116 St., Edmonton AB, Edmonton, T6J1P3, Canada
Michael J. Brett
Affiliation:
[email protected], University of Alberta, Electrical and Computer Engineering, University of Alberta, ECERF, 9107 - 116 St., Edmonton AB, Edmonton, T6J1P3, Canada
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Abstract

The effects of several microstructural parameters on the mechanical behaviour of a helically perforated thin film structure, or inverse microspring, were investigated using a finite element model[1]. The parameters investigated were the helical pitch angle, the cross-section radius, and the coil spacing. The elastic modulus was found to depend most strongly on the helical pitch angle (changing by a factor of 1.3 as the pitch angle went from 35° to 70°). Variations in the coil radius and the film thickness had a minor effect on the modulus. It was also found that using a finite size model (as opposed to an infinite model using periodic boundary conditions) produced better conditioned results. A preliminary confirmation of the model's validity was performed by comparison to nanoindentation results of a nickel helically perforated thin film.

Keywords

simulationelastic propertiesnanoscale
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 977: Symposium FF – Processing-Structure-Mechanical Property Relations in Composite Materials , 2006 , 977-FF12-24
Copyright
Copyright © Materials Research Society 2007

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References

1. Fernando, S.P., Elias, A.L., and Brett, M.J.: Mechanical properties of helically perforated thin films. J. Mater. Res. 21, 1101–1105 (May 2006).Google Scholar
2. Sundararajan, S. and Bhushan, B.: Development of AFM-based techniques to measure mechanical properties of nanoscale structures. Sensors and Actuators A: Physical 101 (Issue 3), 338–351 (Oct. 2002).Google Scholar
3. Sharpe, W.N. Jr, Yuan, B., and Edwards, R.L.: A new technique for measuring the mechanical properties of thin films. J. Microelectromech. Syst. 6, 193–199 (1997).Google Scholar
4. Namazu, T., Isono, Y., and Tanaka, T.: Evaluation of size effect on mechanical properties of single-crystal silicon by nanoscale bending test using AFM. J. Microelectromech. Syst. 9, 450–459 (2000).Google Scholar
5. Robbie, K., Brett, M.J., and Lakhtakia, A.: Chiral sculptured thin films. Nature 384, 616 (Dec. 26, 1996).10.1038/384616a0Google Scholar
6. Robbie, K. and Brett, M.J.: US Patent 5866204 (Feb. 2, 1999).Google Scholar
7. Seto, M.W., Dick, B., and Brett, M.J.: Microsprings and microcantilevers: studies of mechanical response. J. Micromech. Microeng. 11, 582–588 (2001).Google Scholar
8. Elias, A.L., Harris, K.D., and Brett, M.J.: Fabrication of helically perforated gold, nickel, and polystyrene thin films. J. Microelectromech. Syst. 13, 808–813 (2004).Google Scholar
9. Young, W.C.: Roark's Formulas for Stress and Strain: 6th Edition. (McGraw-Hill, New York, 1989), p. 386.Google Scholar
10. ANSYS® Inc. (http://www.ansys.com).Google Scholar
11. Robbie, K., Sit, J.C., and Brett, M.J.: Advanced techniques for Glancing Angle Deposition. J. Vac. Sci. Technol. B 16, 1115–1122 (1998).Google Scholar
12. Jensen, M.O. and Brett, M.J.: Porosity engineering in Glancing Angle Deposition thin films. Applied Physics A 80, 763–768 (2005).Google Scholar
13. Malac, M., Egerton, R.F., Brett, M.J., and Dick, B.: Fabrication of submicrometer regular arrays of pillars and helices. J. Vac. Sci. Technol. B 17, 2671–2674 (1999).Google Scholar