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Grating Coupled Waveguide Biosensor Based on Porous Silicon

Published online by Cambridge University Press:  21 March 2011

Xing Wei  and
Sharon M. Weiss
Xing Wei
Affiliation:
Department of Electrical Engineering and Computer Science, Vanderbilt University, Nashville, TN 37235, USA
Sharon M. Weiss
Affiliation:
Department of Electrical Engineering and Computer Science, Vanderbilt University, Nashville, TN 37235, USA
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Abstract

Porous silicon waveguides with integrated porous silicon grating couplers are demonstrated as small molecule biosensors. Two fabrication methods are presented for the grating couplers: standard electron beam lithography with reactive ion etching and a new technique based on direct imprinting of porous substrates. Although the gratings fabricated using standard lithographic techniques have steeper sidewalls and enable a larger available sensing surface area inside the waveguide, the imprinted gratings have the advantage of rapid and low-cost fabrication. Both the lithographically and imprinted sensors are shown to have waveguide losses on the order of 10 dB/cm, and both are demonstrated for detection of 16mer nucleic acids.

Keywords

Siopticalsensor
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1301: Symposium V/NN/OO/PP – Soft Matter, Biological Materials and Biomedical Materials—Synthesis, Characterization and Applications , 2011 , mrsf10-1301-pp03-09
Copyright
Copyright © Materials Research Society 2011

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