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Flexible Surface Acoustic Wave Based Temperature and Humidity Sensors

Published online by Cambridge University Press:  27 January 2014

X.L. He ,
J. Zhou ,
W.B. Wang ,
W.P. Xuan ,
D.J. Li ,
S.R. Dong ,
H. Jin ,
Y. Xu  and
J.K. Luo
X.L. He
Affiliation:
Department of Information Science & Electronic Engineering, Zhejiang University and Cyrus Tang Center for Sensor Materials and Applications, 38 Zheda Road, Hangzhou 310027, China.
J. Zhou
Affiliation:
Department of Information Science & Electronic Engineering, Zhejiang University and Cyrus Tang Center for Sensor Materials and Applications, 38 Zheda Road, Hangzhou 310027, China.
W.B. Wang
Affiliation:
Department of Information Science & Electronic Engineering, Zhejiang University and Cyrus Tang Center for Sensor Materials and Applications, 38 Zheda Road, Hangzhou 310027, China.
W.P. Xuan
Affiliation:
Department of Information Science & Electronic Engineering, Zhejiang University and Cyrus Tang Center for Sensor Materials and Applications, 38 Zheda Road, Hangzhou 310027, China.
D.J. Li
Affiliation:
Institute of Renewable Energy and Environment Technology, Bolton University, Deane Road, Bolton BL3 5AB, United Kingdom
S.R. Dong
Affiliation:
Department of Information Science & Electronic Engineering, Zhejiang University and Cyrus Tang Center for Sensor Materials and Applications, 38 Zheda Road, Hangzhou 310027, China.
H. Jin
Affiliation:
Department of Information Science & Electronic Engineering, Zhejiang University and Cyrus Tang Center for Sensor Materials and Applications, 38 Zheda Road, Hangzhou 310027, China.
Y. Xu
Affiliation:
Department of Information Science & Electronic Engineering, Zhejiang University and Cyrus Tang Center for Sensor Materials and Applications, 38 Zheda Road, Hangzhou 310027, China.
J.K. Luo*
Affiliation:
Department of Information Science & Electronic Engineering, Zhejiang University and Cyrus Tang Center for Sensor Materials and Applications, 38 Zheda Road, Hangzhou 310027, China. Institute of Renewable Energy and Environment Technology, Bolton University, Deane Road, Bolton BL3 5AB, United Kingdom
*
*Corresponding authors E-mail: [email protected]
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Abstract

Flexible surface acoustic wave (SAW) based temperature and humidity sensors were fabricated and characterized. ZnO piezoelectric films were deposited on polyimide substrates by DC magnetron sputtering. ZnO films possess (0002) crystal orientation with large grain sizes of 50∼70 nm. SAW devices showed two wave modes, namely the Rayleigh and Lamb modes, with the frequencies at fR ∼132MHz and fL∼427MHz respectively for a wavelength of 12 μm device. The two resonant frequencies have a temperature coefficient of frequency (TCF) of −423ppm/K and −258ppm/K for the Rayleigh and Lamb waves, respectively. The SAW sensors exhibited a good repeatability in responding to cyclic change of humidity. The responses of the sensors increase with the increase in humidity, and the sensitivity increases with the decrease in wavelength. A high sensitivity of 34.7 kHz/10%RH has been obtained from a SAW device without any surface treatment, demonstrated that the flexible SAW humidity sensors are very promising for application in flexible sensors and microsystems.

Keywords

crystal growthsensorpiezoelectric
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1659: Symposium SS/XX – Micro- and Nanoscale Systems – Novel Materials, Structures and Devices , 2014 , pp. 75 - 80
Copyright
Copyright © Materials Research Society 2014 

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