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Faceting of Stepped Silicon (113) Surfaces: Step Unbinding, Dynamic Scaling, and Nano-Scale Grooves

Published online by Cambridge University Press:  15 February 2011

S. G. J. Mochrie ,
S. Song  and
Mirang Yoon
S. G. J. Mochrie
Affiliation:
Department of Physics, Massachusetts Institute of Technology, Cambridge, MA 02139
S. Song
Affiliation:
Department of Physics, Massachusetts Institute of Technology, Cambridge, MA 02139
Mirang Yoon
Affiliation:
Department of Physics, Massachusetts Institute of Technology, Cambridge, MA 02139
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Abstract

X-ray scattering studies are reviewed of the faceting kinetics of stepped silicon (113) surfaces misoriented towards [001]. Following a quench from the one-phase region of the orientational phase diagram into the coexistence region, initially-uniformly-distributed steps rearrange to form a grooved superstructure. Our measurements reveal the behavior of the grooved surface morphology as a function of time. The surface is found to be self-similar in time, with a characteristic groove size (L) varying as a power-law versus time (t): L = L0tøwith a coarsening exponent of ø = 0.164 ± 0.021 ≃ 1/6, consistent with a theory for the kinetics of faceting which focuses on thermally fluctuating step bunches and their collisions. At later times, the groove size approaches a limiting value which depends on the stepped phase misorientation angle, as expected for faceted surfaces in the case that elastic effects are important.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 440: Symposia CA – Structure and Evolution of Surfaces , 1996 , 3
Copyright
Copyright © Materials Research Society 1997

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