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Fabrication and Characterization of MEMS-Based Structures from a Bio-Inspired, Chemo-Responsive Polymer Nanocomposite

Published online by Cambridge University Press:  20 January 2011

Allison E. Hess  and
Christian A.. Zorman
Allison E. Hess
Affiliation:
Department of Electrical Engineering and Computer Science, Case Western Reserve University, Cleveland, OH, 44106
Christian A.. Zorman
Affiliation:
Department of Electrical Engineering and Computer Science, Case Western Reserve University, Cleveland, OH, 44106 Advanced Platform Technology Center of Excellence, Louis Stokes Cleveland VA Medical Center, Cleveland, OH, 44106
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Abstract

This paper reports the development of micromachining processes, as well as electrical and mechanical evaluation of a stimuli-responsive, mechanically-dynamic polymer nanocomposite for biomedical microsystems. The nanocomposite, which consists of a cellulose nanofiber network embedded in a poly(vinyl acetate) matrix, was shown to display a switchable stiffness comparable to bulk samples, with a Young’s modulus of 3570 MPa in the dry state, which reduced to ~25 MPa in the wet state, with a stiff-to-flexible transition-time dependent on exposed surface area. Upon immersion in phosphate buffered saline, the ac resistance through the PVAc-TW thickness was found to reduce from 8.04 MΩ to ~17 kΩ. Electrochemical impedance of an Au electrode on PVAc-TW was found to be ~178 kΩ at 1 kHz, and this was found to be stable as the probe shank was flexed to compress the metal, but increased with increasing flex angle when the metal was flexed into a tensile state.

Keywords

microelectro-mechanical (MEMS)polymerstress/strain relationship
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1299: Symposium S – Microelectromechanical Systems—Materials and Devices IV , 2011 , mrsf10-1299-s04-07
Copyright
Copyright © Materials Research Society 2011

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